Structural properties and sensing characteristics of thin Nd2 O3 sensing films for pH detection

Electrochemical and Solid-State Letters

Volumn 12, Issue 10, 2009, Pages

  Pan, Tung Ming ^a   Lin, Chao Wen ^a   Lin, Jian Chi ^a   Wu, Min Hsien ^a  

^a CHANG GUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

DRIFT RATES; HYSTERESIS VOLTAGE; MORPHOLOGICAL FEATURES; PH DETECTION; PH SENSING; SENSING CHARACTERISTICS; SENSING FILMS; SI (100) SUBSTRATE; THERMAL-ANNEALING; X- RAY DIFFRACTION;

ANNEALING; ATOMIC FORCE MICROSCOPY; ATOMIC SPECTROSCOPY; CRYSTAL ATOMIC STRUCTURE; ELECTRIC POTENTIAL; NEODYMIUM; PH SENSORS;

X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 68949141483     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.3193552     Document Type: Article

References (23)

1. P. Bergveld, IEEE Trans. Biomed. Eng. 0018-9294, 17, 70 (1970). 10.1109/TBME.1970.4502688
2. S. Nakamoto, N. Ito, T. Kuriyama, and J. Kimura, Sens. Actuators 0250-6874, 13, 165 (1988). 10.1016/0250-6874(88)80039-8
3. S. Jamasb, S. D. Collins, and R. L. Smith, IEEE Trans. Electron Devices 0018-9383, 45, 1239 (1998). 10.1109/16.678525
4. A. Fog and R. Buck, Sens. Actuators 0250-6874, 5, 137 (1984). 10.1016/0250-6874(84)80004-9 (Pubitemid 14592022)
5. J. L. Chiang, S. S. Jan, J. C. Chou, and Y. C. Chen, Sens. Actuators B 0925-4005, 76, 624 (2001). 10.1016/S0925-4005(01)00657-8 (Pubitemid 32513944)
6. J. C. Chou and Y. F. Wang, Sens. Actuators B 0925-4005, 86, 58 (2002). 10.1016/S0925-4005(02)00147-8 (Pubitemid 34892113)
7. D. H. Kwon, B. W. Cho, C. S. Kim, and B. K. Sohn, Sens. Actuators B 0925-4005, 34, 441 (1996). 10.1016/S0925-4005(96)01938-7
8. P. K. Shin, Appl. Surf. Sci. 0169-4332, 214, 214 (2003). 10.1016/S0169-4332(03)00340-4
9. L. Bousse, H. H. van der Vlekkert, and N. F. de Rooij, Sens. Actuators B 0925-4005, 2, 103 (1990). 10.1016/0925-4005(90)80018-U
10. G. D. Wilk, R. M. Wallace, and J. M. Anthony, J. Appl. Phys. 0021-8979, 89, 5243 (2001). 10.1063/1.1361065
11. J. Kwo, M. Hong, A. R. Kortan, K. L. Queeney, Y. J. Chabal, R. L. Opila, Jr., D. A. Muller, S. N. G. Chu, B. J. Sapjeta, T. S. Lay, J. Appl. Phys. 0021-8979, 89, 3920 (2001). 10.1063/1.1352688
12. M. Fanciulli and G. Scarel, Rare Earth Oxide Thin Film: Growth, Characterization, and Applications, Springer, Berlin (2007).
13. T. M. Pan and K. M. Liao, Sens. Actuators B 0925-4005, 127, 480 (2007). 10.1016/j.snb.2007.04.050 (Pubitemid 47599904)
14. T. M. Pan and K. M. Liao, IEEE Sens. J. 1530-437X, 8, 1856 (2008). 10.1109/JSEN.2008.2006259
15. A. Fissel, Z. Elassar, O. Kirfel, E. Bugiel, M. Czernohorsky, and H. J. Osten, J. Appl. Phys. 0021-8979, 99, 074105 (2006). 10.1063/1.2188051
16. T. M. Pan, J. D. Lee, W. H. Shu, and T. T. Chen, Appl. Phys. Lett. 0003-6951, 89, 232908 (2006). 10.1063/1.2402237 (Pubitemid 44907275)
17. J. F. Moulder, J. Chastain, W. F. Stickle, P. E. Sobol, K. D. Bomben, and R. C. King, Handbook of X-ray Photoelectron Spectroscopy: A Reference Book of Standard Spectra for Identification and Interpretation of XPS Data, Perkin-Elmer Corporation, Eden Prairie, MN (1995).
18. A. Garde, J. Alderman, and W. Lane, Sens. Actuators B 0925-4005, 27, 341 (1995). 10.1016/0925-4005(94)01614-N
19. C. D. Fung, P. W. Cheung, and W. H. Ko, IEEE Trans. Electron Devices 0018-9383, 33, 8 (1986). 10.1109/T-ED.1986.22429
20. S. Jamasb, S. Collins, and R. L. Smith, Sens. Actuators B 0925-4005, 49, 146 (1998). 10.1016/S0925-4005(98)00040-9
21. Y. Miao, J. Guan, and J. Chen, Biotechnol. Adv. 0734-9750, 21, 527 (2003). 10.1016/S0734-9750(03)00103-4 (Pubitemid 37332120)
22. L. Bousse, S. Mostarshed, B. van der Schoot, and N. F. de Rooij, Sens. Actuators B 0925-4005, 17, 157 (1994). 10.1016/0925-4005(94)87044-6
23. P. D. Kirsch, C. S. Kang, J. Lozano, J. C. Lee, and J. G. Ekerdt, J. Appl. Phys. 0021-8979, 91, 4353 (2002). 10.1063/1.1455155 (Pubitemid 34435583)