Measurement method for the refractive index of thick solid and liquid layers

Applied Optics

Volumn 48, Issue 22, 2009, Pages 4430-4436

  Šantic, Branko ^a   Gracin, Davor ^a   Juraić, Krunoslav ^a  

^a RUDER BO KOVI INSTITUTE   (Croatia)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFEROMETRY; LIGHT TRANSMISSION; LIQUIDS; REFRACTOMETERS; SAPPHIRE;

INCIDENCE ANGLES; INTERFEROMETRIC METHODS; LIQUID LAYER; MEASUREMENT METHODS; REFRACTIVE INDEX MEASUREMENT; SIMPLE METHOD; WEAK ABSORPTION; WINDOW GLASS;

REFRACTIVE INDEX;

EID: 68749092865     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.48.004430     Document Type: Article

References (31)

1. S. Singh, "Refractive index measurement and its applications," Phys. Scr. 65, 167-180 (2002).
2. M. Born and E. Wolf, Principles of Optics, 7th ed. (Cambridge University, 1999).
3. O. S. Heavens, Optical Properties of Thin Solid Films (Dover, 1965).
4. H. A. Macleod, Thin-Film Optical Filters, 3rd ed. (Institute of Physics, 2001).
5. S. Y. El-Zaiat, "Measuring the thickness and refractive index of a thick transparent plate by an unexpanded laser beam," Opt. Laser Technol. 29, 63-65 (1997).
6. R. Ulrich and R. Torge, "Measurement of thin film parameters with a prism coupler," Appl. Opt. 12, 2901-2908 (1973).
7. M. Galli, F. Marabelli, and D. Comoretto, "Interferometric determination of the anisotropic refractive index dispersion of poly-(p-phenylene-vinylene)," Appl. Phys. Lett. 86, 201119 (2005).
8. M. J. Jang and C. F. Lu," A measurement system for determining the thickness of an optical wave plate," Opt. Commun. 253, 2-9 (2005).
9. S. Y. El-Zaiat, "Group refractive index measurement by fringes of equal chromatic order," Opt. Laser Technol. 37, 181-186 (2005).
10. H. Moosmüller and W. P. Arnott, "Folded Jamin interferometer: a stable instrument for refractive-index measurements," Opt. Lett. 21, 438-440 (1996).
11. M. Ohmi, T. Shiraishi, H. Tajiri, and M. Haruna, "Simultaneous measurement of refractive index and thickness of transparent plates by low coherence interferometry," Opt. Rev. 4, 507-515 (1997).
12. D. E. Aspnes, "Expanding horizons: new developments in ellipsometry and polarimetry," Thin Solid Films 455-456, 3-13 (2004).
13. M. Schubert, "Generalized ellipsometry and complex optical systems," Thin Solid Films 313-314, 323-332 (1998).
14. R. Goldhahn, S. Shokhovets, J. Scheiner, G. Gobsch, T. S. Cheng, C. T. Foxon, U. Kaiser, D. Kipshidze, and W. Richter, "Determination of group III nitride film properties by reflectance and spectroscopic ellipsometry studies," Phys. Status Solidi A 177, 107-115 (2000).
15. T. Fukano and I. Yamaguchi, "Separation of measurement of the refractive index and the geometrical thickness by use of a wavelength-scanning interferometer with a confocal microscope," Appl. Opt. 38, 4065-4073 (1999).
16. B. Šantić and F Scholz, "On the evaluation of optical parameters of a thin semiconductor film from transmission spectra, and application to GaN films," Meas. Sci. Technol. 19, 105303 (2008).
17. J. C. Manifacier, J. Gasiot, and J. P. Fillard, "A simple method for the determination of the optical constants n, k and the thickness of a weakly absorbing thin film," J. Phys. E 9, 1002-1004 (1976).
18. W. A. Pliskin, "Refractive index dispersion of dielectric films used in the semiconductor industry," J. Electrochem. Soc. 134, 2819-2826 (1987).
19. R. Swanepoel, "Determination of the thickness and optical constants of a-Si," J. Phys. E 16, 1214-1222 (1983).
20. W. A. Pliskin and E. E. Conrad, "Nondestructive determination of thickness and refractive index of transparent films," IBM J. Res. Dev. 8, 43-51 (1964).
21. A. J. Warnecke and P. J. LoPresti, "Refractive index dispersion in semiconductor-related thin films," IBM J. Res. Dev. 17, 256-262 (1973).
22. B. Šantić, "Simultaneous measurement of the refractive index and thickness of a thin film," submitted to Thin Solid Films.
23. K. Ishikawa, H. Yamano, K. Kagawa, K. Asada, K. Iwata, and M. Ueda, "Measurement of thickness of a thin film by means of laser interference at many incident angles," Opt. Lasers Eng. 41, 19-29 (2004).
24. C. Jung and B. K. Rhee, "Simultaneous determination of thickness and optical constants of polymer thin film by analyzing transmittance," Appl. Opt. 41, 3861-3865 (2002).
25. R. Swanepoel, "Determining refractive index and thickness of thin films from wavelength measurements only," J. Opt. Soc. Am. A 2, 1339-1343 (1985).
26. A. Lamminpää, S. Nevas, F Manoocheri, and E. Ikonen, "Characterization of thin films based on reflectance and transmittance measurements at oblique angles of incidence," Appl. Opt. 45, 1392-1396 (2006).
27. B. Cox and Y.-M. Wong, "Direct measurement of the thickness and optical properties of zirconia corrosion films," J. Nucl. Mater. 199, 258-271 (1993).
28. G. I. Surdutovich, R. Z. Vitlina, and V. Baranauskas, "Simple reflectometric method for measurement of weakly absorbing films," Thin Solid Films 355-356, 446-450 (1999).
29. H. El-Kashef, G. E. Hassan, and I. El-Ghazaly, "Mach- Zehnder optical system as a sensitive measuring instrument," Appl. Opt. 33, 3540-3544 (1994).
30. M. A. Khashan and A. Y. Nassif, "Accurate measurement of the refractive indices of solids and liquids by the double-layer interferometer," Appl. Opt. 39, 5991-5997 (2000).
31. Properties of sapphire, http://www.mellesgriot.com/products/optics/mp 3-5.htm.