Characterization of boron- and phosphorous-incorporated tetrahedral amorphous carbon films deposited by the filtered cathodic vacuum arc process

Japanese Journal of Applied Physics

Volumn 48, Issue 6, 2009, Pages

  Panwar, Omvir Singh ^a   Khan, Mohd Alim ^a   Kumar, Mahesh ^a   Shivaprasad, Sonnada Math ^a   Satyanarayana, Bukinakere Subbakrihniah ^b   Dixit, Prakash Narain ^a   Bhattacharyya, Raghunath ^a  

^a NATIONAL PHYSICAL LABORATORY   (India)

^b MANIPAL INSTITUTE OF TECHNOLOGY   (India)

Author keywords

[No Author keywords available]

Indexed keywords

AS-GROWN; AUGER PEAK; B INCORPORATION; CORE LEVELS; DEPOSITED FILMS; DIAMOND-LIKE; FILTERED CATHODIC VACUUM ARC; NEGATIVE SUBSTRATES; RAMAN SPECTRA; RAMAN STUDIES; SYSTEMATIC STUDY; TA-C FILM; TETRAHEDRAL AMORPHOUS CARBON (TA-C) FILMS; TETRAHEDRAL AMORPHOUS CARBON FILMS; VALENCE BAND SPECTRA; X-RAY-INDUCED AUGER ELECTRON SPECTROSCOPY;

AMORPHOUS CARBON; AUGER ELECTRON SPECTROSCOPY; AUGERS; BORON; BORON COMPOUNDS; CARBON FILMS; CAVITY RESONATORS; DIAMOND FILMS; PHOSPHORUS; PHOTOELECTRICITY; PHOTOIONIZATION; PHOTONS; RAMAN SPECTROSCOPY; SUBSTRATES; VACUUM; VACUUM APPLICATIONS; X RAY PHOTOELECTRON SPECTROSCOPY;

AMORPHOUS FILMS;

EID: 68649125626     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.48.065501     Document Type: Article

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