Large fabrication tolerance for VCSELs using high-contrast grating

IEEE Photonics Technology Letters

Volumn 20, Issue 6, 2008, Pages 434-436

  Zhou, Ye ^a   Huang, Michael C Y ^a   Chang Hasnain, Connie J ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Gratings; Mirrors; Optical communication; Optical microelectromechanical systems; Vertical cavity surface emitting laser (VCSEL)

Indexed keywords

CRITICAL DIMENSION; EMISSION WAVELENGTH; FABRICATION TOLERANCES; GRATING PERIODS; GRATING SPACINGS; GRATINGS; HIGH CONTRAST; HIGH INDEX CONTRAST; OPTICAL MICROELECTROMECHANICAL SYSTEM; OPTICAL MICROELECTROMECHANICAL SYSTEMS; SINGLE LAYER; SUB-WAVE LENGTH GRATING; VERTICAL-CAVITY SURFACE EMITTING LASER;

COMPOSITE MICROMECHANICS; LASERS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROOPTICS; OPTICAL COMMUNICATION; OPTICAL WAVEGUIDES; SURFACE EMITTING LASERS;

MIRRORS;

EID: 51149097677     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2008.916969     Document Type: Article

References (9)

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