Recombination at textured silicon surfaces passivated with silicon dioxide

Journal of Applied Physics

Volumn 105, Issue 12, 2009, Pages

  McIntosh, Keith R ^a   Johnson, Luke P ^a  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER RECOMBINATION; CAPACITANCE VOLTAGE; CARRIER RECOMBINATION; DENSITY OF INTERFACE STATE; EXPERIMENTAL STUDIES; PHOTOCONDUCTANCE; SHOCKLEY-READ-HALL RECOMBINATIONS; SILICON DIOXIDE; SILICON SURFACES; SURFACE AREA; SURFACE STATE; TEXTURED SURFACE;

CRYSTAL ORIENTATION; DANGLING BONDS; ELECTRIC POTENTIAL; EXPERIMENTS; MOS CAPACITORS; PASSIVATION; PHOSPHORUS; SEMICONDUCTOR QUANTUM DOTS; SILICA; SOLAR ENERGY;

SURFACE DEFECTS;

EID: 67650230204     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3153979     Document Type: Conference Paper

References (68)

1. R. A. Arndt, J. F. Allison, J. G. Haynos, and A. Meulenberg, Proceedings of the 11th IEEE Photovoltaics Specialists Conference, Scotttsdale, 1975 (IEEE, New York, 1975), p. 40.
2. A. Goetzberger, Proceedings of the 15th IEEE Photovoltaics Specialists Conference, Kissemme, 1981 (IEEE, New York, 1981), p. 867.
3. E. Yablonovitch, J. Opt. Soc. Am. 0030-3941 72, 899 (1982). 10.1364/JOSA.72.000899
4. P. Campbell and M. A. Green, J. Appl. Phys. 0021-8979 62, 243 (1987). 10.1063/1.339189
5. C. R. Baraona and H. W. Brandhorst, Proceedings of the 11th IEEE Photovoltaics Specialists Conference, Scotttsdale, 1975 (IEEE, New York, 1975), p. 44.
6. D. E. Lee, J. Appl. Phys. 0021-8979 40, 4569 (1969). 10.1063/1.1657233
7. W. P. Hirshman, Photon International 3-2009, 170 (2008).
8. J. W. Müller, A. Metz, and R. Hezel, Proceedings of the 17th EU Photovoltaic Solar Energy Conference, Münich, 2001 (WIP-Renewable Energies, Münich, 2001), p. 347.
9. D. L. King and M. E. Buck, Proceedings of the 22nd IEEE Photovoltaics Specialists Conference, Las Vegas, 1991 (IEEE, New York, 1991), p. 303.
10. T. Lauinger, J. Schmidt, A. G. Aberle, and R. Hezel, Appl. Phys. Lett. 0003-6951 68, 1232 (1996). 10.1063/1.115936
11. R. Chaoui, M. Lachab, S. Chiheub, and N. Seddiki, Proceedings of the 14th EU Photovoltaic Solar Energy Conference, Barcelona, 1997 (H. S. Stephens, Bedford, 1997), p. 812.
12. Y. Nishimoto and K. Namba, Sol. Energy Mater. Sol. Cells 0927-0248 61, 393 (2000). 10.1016/S0927-0248(99)00162-2
13. W. Sparber, O. Schultz, D. Biro, G. Emanuel, R. Preu, A. Poddey, and D. Borchert, Proceedings of the Third World Conference on Photovoltaic Energy Conversion, Osaka, 2003 (unpublished), p. 1372.
14. I. Melnyk, E. Wefringhaus, M. McCann, A. Helfricht, A. Hauser, and P. Fath, Proceedings of the 19th EU Photovoltaic Solar Energy Conference, Paris, 2004 (WIP-Renewable Energies, Münich, 2004), p. 1090.
15. P. K. Singh, R. Kumar, M. Lal, S. N. Singh, and B. K. Das, Sol. Energy Mater. Sol. Cells 0927-0248 70, 103 (2001). 10.1016/S0927-0248(00)00414-1
16. E. Vazsonyi, K. De Clercq, R. Einhaus, E. Van Kerschaver, K. Said, J. Poortmans, J. Szlufcik, and J. Nijs, Sol. Energy Mater. Sol. Cells 0927-0248 57, 179 (1999). 10.1016/S0927-0248(98)00180-9
17. T. Sun, D. Chen, and R. Chui, Proc. SPIE 0277-786X 4086, 116 (2000). 10.1117/12.408408
18. O. Tabata, R. Asahi, H. Funabashi, K. Shimaoka, and S. Sugiyama, Sens. Actuators, A 0924-4247 34, 51 (1992). 10.1016/0924-4247(92)80139-T
19. L. M. Landsberger, S. Naseh, M. Kahrizi, and M. Paranjape, J. Microelectromech. Syst. 1057-7157 5, 106 (1996). 10.1109/84.506198
20. J. S. You, D. Kim, J. Y. Huh, H. J. Park, J. J. Pak, and C. S. Kang, Sol. Energy Mater. Sol. Cells 0927-0248 66, 37 (2001). 10.1016/S0927-0248(00)00156-2
21. P. Papet, O. Nichiporuk, A. Kaminski, Y. Rozier, J. Kraiem, J. -F. Lelievre, A. Chaumartin, A. Fave, and M. Lemiti, Sol. Energy Mater. Sol. Cells 0927-0248 90, 2319 (2006). 10.1016/j.solmat.2006.03.005
22. M. J. Declercq, L. Gerzberg, and J. D. Meind, J. Electrochem. Soc. 0013-4651 122, 545 (1975). 10.1149/1.2134257
23. H. Seidel, L. Csepregi, A. Heuberger, and H. Baumgartel, J. Electrochem. Soc. 0013-4651 137, 3612 (1990). 10.1149/1.2086277
24. W. L. Bailey, M. G. Coleman, C. B. Harris, and I. A. Lesk, U.S. Patent No. 4137123 (Jan. 30, 1979).
25. F. Llopis and I. Tobías, Prog. Photovoltaics 1062-7995 13, 27 (2005). 10.1002/pip.571
26. F. Hernando, R. Guit́rrez, G. Bueno, F. Recart, and V. Rodriguez, Proceedings of the Second World Conference on Photovoltaic Energy Conversion, Vienna, 1998, (WIP-Renewable Energies, Münich, 1998) p. 1321.
27. J. Zhao, A. Wang, P. P. Altermatt, and M. A. Green, Appl. Phys. Lett. 0003-6951 66, 3636 (1995). 10.1063/1.114124
28. A. Parretta, A. Sarno, P. Tortora, H. Yakubu, P. Maddalena, J. Zhao, and A. Wang, Opt. Commun. 0030-4018 172, 139 (1999). 10.1016/S0030-4018(99)00561-1
29. B. L. Sopori, Sol. Cells 0379-6787 25, 15 (1988). 10.1016/0379-6787(88) 90053-1
30. J. D. Hylton, A. R. Burgers, and W. C. Sinke, J. Electrochem. Soc. 0013-4651 151, G408 (2004). 10.1149/1.1738137
31. Y. Nishimoto, T. Ishihara, and K. Namba, J. Electrochem. Soc. 0013-4651 146, 457 (1999). 10.1149/1.1391628
32. A. Hauser, I. Melnyk, E. Wefringhaus, F. Delahaye, G. Vilsmeier, and P. Fath, Proceedings of the 19th EU Photovoltaic Solar Energy Conference, Paris, 2004 (WIP-Renewable Energies, Münich, 1997), p. 1094.
33. J. Zhao, A. Wang, M. A. Green, and F. Ferrazza, Appl. Phys. Lett. 0003-6951 73, 1991 (1998). 10.1063/1.122345
34. S. Winderbaum, O. Reinhold, and F. Yun, Sol. Energy Mater. Sol. Cells 0927-0248 46, 239 (1997). 10.1016/S0927-0248(97)00011-1
35. O. Schultz, G. Emanuel, S. W. Glunz, and G. P. Willeke, Proceedings of the Third World Conference on Photovoltaic Energy Conversion, Osaka, 2003 (unpublished), p. 1360.
36. M. Spiegel, C. Gerhards, F. Huster, W. Jooss, P. Fath, and E. Bucher, Sol. Energy Mater. Sol. Cells 0927-0248 74, 175 (2002). 10.1016/S0927-0248(02) 00062-4
37. A. Stesmans and V. V. Afanas'ev, J. Vac. Sci. Technol. B 1071-1023 16, 3108 (1998). 10.1116/1.590449
38. S. W. Glunz, S. Sterk, R. Steeman, W. Warta, J. Knobloch, and W. Wettling, Proceedings of the 13th EU Photovoltaic Solar Energy Conference, Nice, 1995 (H. S. Stephens, Bedford, 1995), p. 409.
39. P. J. Cousins and J. E. Cotter, Sol. Energy Mater. Sol. Cells 0927-0248 90, 228 (2006). 10.1016/j.solmat.2005.03.008
40. L. P. Johnson and K. R. McIntosh, Proceedings of the 17th International Photovoltaic Science and Engineering Conference, Fukuoka, 2007 (Toyota Technological Institute, Nagoya, 2007), p. 690.
41. R. R. King, R. A. Sinton, and R. M. Swanson, IEEE Trans. Electron Devices 0018-9383 37, 365 (1990). 10.1109/16.46368
42. M. J. Kerr, J. Schmidt, A. Cuevas, and J. H. Bultman, J. Appl. Phys. 0021-8979 89, 3821 (2001). 10.1063/1.1350633
43. H. Jin, K. J. Weber, and A. W. Blakers, Proceedings of the Fourth World Conference on Photovoltaic Energy Conversion, Waikaloa, HI, 2006 (IEEE, New York, 2006), p. 1078.
44. H. Jin, K. J. Weber, and A. W. Blakers, Proceedings of the Fourth World Conference on Photovoltaic Energy Conversion, Waikaloa, HI, 2006 (IEEE, New York, 2006), p. 1071.
45. F. W. Chen, T. T. A. Li, and J. E. Cotter, Proceedings of the Fourth World Conference on Photovoltaic Energy Conversion, Waikaloa, HI, 2006 (IEEE, New York, 2006), p. 1020.
46. W. L. F. Chen, " PECVD Silicon Nitride for n. -type Silicon Solar Cells," Ph.D. thesis, UNSW, 2008.
47. P. P. Altermatt, J. O. Schumacher, A. Cuevas, M. J. Kerr, S. W. Glunz, R. R. King, G. Heiser, and A. Schenk, J. Appl. Phys. 0021-8979 92, 3187 (2002). 10.1063/1.1501743
48. J. Hong, W. M. M. Kessels, W. J. Soppe, A. W. Weeber, W. M. Arnoldbik, and M. C. M van de Sanden, J. Vac. Sci. Technol. B 1071-1023 21, 2123 (2003). 10.1116/1.1609481
49. H. Jin, K. J. Weber, and A. W. Blakers, Proceedings of the 15th International Photovoltaic Science and Engineering Conference, Shanghai, 2005 (unpublished), p. 301.
50. H. Jin, K. J. Weber, and A. W. Blakers, Proceedings of the Fourth World Conference on Photovoltaic Energy Conversion, Waikaloa, HI, 2006 (IEEE, New York, 2006), p. 1000.
51. F. Recart and A. Cuevas, IEEE Trans. Electron Devices 0018-9383 53, 442 (2006). 10.1109/TED.2006.870846
52. C. H. Hsueh and A. G. Evans, J. Appl. Phys. 0021-8979 54, 6672 (1983). 10.1063/1.331854
53. A. J. M. van Erven, R. C. M. Bosch, and M. D. Bijker, Prog. Photovoltaics 1062-7995 16, 615 (2008). 10.1002/pip.841
54. A. G. Aberle, S. Glunz, and W. Warta, J. Appl. Phys. 0021-8979 71, 4422 (1992). 10.1063/1.350782
55. K. R. McIntosh, J. H. Guo, M. D. Abbott, and R. A. Bardos, Prog. Photovoltaics 1062-7995 16, 279 (2008). 10.1002/pip.810
56. International Standard, IEC 60904-3, Edition 2.0, 2008.
57. H. A. Macleod, Thin Film Optical Filters, 2nd ed. (Adam Hilger Ltd., Techno House, Bristol, BS1 6NX, 1986).
58. Handbook of Optical Constants of Solids, edited by, E. D. Palik, (Academic, Orlando, 1985), Vol. 1, p. 759.
59. M. A. Green and M. J. Keevers, Prog. Photovoltaics 1062-7995 3, 189 (1995). 10.1002/pip.4670030303
60. E. H. Nicollian and J. R. Brews, MOS (Metal Oxide Semiconductor) Physics and Technology (Wiley, New Jersey, 2003), Chap..
61. D. E. Kane and R. M. Swanson, Proceedings of the 18th IEEE Photovoltaics Specialist Conference, Las Vegas, 1985 (IEEE, New York, 1985), p. 578.
62. E. H. Nicollian and J. R. Brews, MOS (Metal Oxide Semiconductor) Physics and Technology (Wiley, New Jersey, 2003), Chap..
63. E. H. Nicollian and J. R. Brews, MOS (Metal Oxide Semiconductor) Physics and Technology (Wiley, New Jersey, 2003), p. 741.
64. R. Castagne and A. Vapaille, Surf. Sci. 0039-6028 28, 157 (1971). 10.1016/0039-6028(71)90092-6
65. W. Füssel, M. Schmidt, H. Angermann, G. Mende, and H. Flietner, Nucl. Instrum. Methods Phys. Res. A 0168-9002 377, 177 (1996). 10.1016/0168-9002(96)00205-7
66. A. G. Aberle, Crystalline Silicon Solar Cells: Advanced Surface Passivation and Analysis (University of New South Wales, Sydney, 1999), pp. 77-78.
67. C. M. Chong, " Buried Contact Solar Cells.," Ph.D. thesis, University of New South Wales, 1989.
68. M. J. Cudzinovic and K. R. McIntosh, Proceedings of the 29th IEEE Photovoltaics Specialist Conference, Las Vegas, 2002 (IEEE, New York, 2002), p. 70.