Effects of operational frequency scaling in multi-degree of freedom MEMS gyroscopes

IEEE Sensors Journal

Volumn 8, Issue 10, 2008, Pages 1672-1680

  Schonfield, Adam R ^a   Trusov, Alexander A ^a   Shkel, Andrei M ^a  

^a University of California at Irvine   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMBIENT VIBRATIONS; AUTOMOTIVE APPLICATIONS; DEGREE OF FREEDOM; DEGREE OF FREEDOM (DOF); DESIGN EQUATION; DESIGN TRADEOFF; DIE SIZE; HIGHER FREQUENCIES; MEMS GYROSCOPE; MICROELECTROMECHANICAL SYSTEMS; MULTI-DOF; OPERATIONAL FREQUENCY; RESONANT FREQUENCIES; SCALE FACTOR; SCALING EFFECTS; SCALING METHOD; SECOND GENERATION; SENSE MODE; SINGLE-AXIS; THERMAL VARIATION;

COMPOSITE MICROMECHANICS; MEMS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; ULTRASONIC DEVICES;

GYROSCOPES;

EID: 67649942198     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2008.2004299     Document Type: Article

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