Structural design trade-offs for mems vibratory rate gyroscopes with 2-DOF sense modes

2007 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC2007

Volumn 1 PART B, Issue , 2008, Pages 1045-1052

  Schofield, Adam R ^a   Trusov, Alexander A ^a   Shkel, Andrel M ^a  

^a Irvine   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

1 DEGREE OF FREEDOM; AMBIENT VIBRATIONS; DESIGN TRADE-OFFS; INTERNATIONAL DESIGNS; LUMPED PARAMETER MODEL (LPM); MECHANICAL VIBRATIONS; MEMS VIBRATORY RATE GYROSCOPES; OPERATIONAL FREQUENCIES; PEAK SPACING; SENSE MODE; TECHNICAL CONFERENCES; TEMPERATURE DRIFTS; VIBRATORY GYROSCOPES;

ARCHITECTURAL DESIGN; COMPUTER NETWORKS; COMPUTERS; ENGINEERING; FEEDBACK CONTROL; LATTICE VIBRATIONS; MICROFLUIDICS; PHOTORESISTS; RECONSTRUCTION (STRUCTURAL); STABILITY; STRUCTURAL DESIGN; TECHNOLOGY; VIBRATION CONTROL; VIBRATIONS (MECHANICAL); VIBRATORS;

GYROSCOPES;

EID: 44849130996     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/DETC2007-35777     Document Type: Conference Paper

References (6)

1. Shkel, A., Acar, C., and Painter, C., 2005. "Two types of micromachined vibratory gyroscopes". IEEE Sensors Conference 2005, Irvine, California, USA, pp. 531-536.
2. Geen, J. A., Sherman, S. J., Chang, J. F., and Lewis, S. R., 2002, "Single-chip surface-micromachined integrated gyroscope with 50 deg/hour root alian variance". IEEE International Solid-State Circuits Conference. Digest of Technical Papers, 2, pp. 346-539.
3. Acar, C., Shkel, A. M., Costlow, L., and Madni, A. M., 2005. "Inherently robust micromachined gyroscopes with 2-dof sense-mode oscillator", IEEE Sensors Conference 2005, Irvine, California, USA, pp, 664-667.
4. Acar, C., and Shkel, A. M., 2006. "Inherently robust micromachined gyroscopes with 2-dof sense-mode oscillator". IEEE Journal of Microelectromechanical Systems, 15(2), pp, 380-387.
5. Acar, C., Painter, C. C., Schofield, A. R., and Shkel, A. M., 2005. "Robust micromachined gyroscopes for automotive applications", NSTI Nanotech 2005 Technical Proceedings, pp. 375-378.
6. Tang, W. C., Nguyen, T.-C. H., and Howe, R. T., 1989. "Laterally driven polysilicon resonant microstructures". Proceedings: IEEE Micro Electro Mechanical Systems. An investigation of Micro Structures, Sensors, Actuators, Machines and Robots, pp. 53-59.