Formation of porous anodic alumina templates in selected micrometer-sized areas on a Si substrate. Application for growing ordered Ti nanopillars

Physica Status Solidi (A) Applications and Materials Science

Volumn 206, Issue 6, 2009, Pages 1309-1312

  Gianneta, V ^a   Huffman, M ^a   Nassiopoulou, A G ^a  

^a INSTITUTE OF MICROELECTRONICS   (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA THIN FILMS; CONFINED AREAS; CYLINDRICAL PORES; MASKING LAYERS; NANOPATTERNING; NANOPILLARS; ON-WAFER; PORE DENSITIES; PORE DIAMETERS; POROUS ANODIC ALUMINA; POROUS ANODIC ALUMINA TEMPLATE; PRE-SELECTED; REGULAR ARRAY; SI SUBSTRATES; SI WAFER; SILICON SUBSTRATES;

ALUMINUM SHEET; ELECTRIC WIRE; GROWTH (MATERIALS); OPTICAL FILMS; SILICON; SILICON OXIDES; SILICON WAFERS; SUBSTRATES; THIN FILMS;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 67649910113     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200881108     Document Type: Article

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