Nanostructuring Si surface and Si/SiO2 interface using porous-alumina-on-Si template technology. Electrical characterization of Si/SiO2 interface

Physica E: Low-Dimensional Systems and Nanostructures

Volumn 38, Issue 1-2, 2007, Pages 1-5

  Kokonou, M ^a   Nassiopoulou, A G ^a  

^a INSTITUTE OF MICROELECTRONICS   (Greece)

Author keywords

Nanopatterning; Nanostructuring; Porous alumina; Si SiO2 interface

Indexed keywords

ALUMINA; ELECTROCHEMISTRY; INTERFACES (MATERIALS); NANOELECTRONICS; POROUS MATERIALS; SILICA; THIN FILMS;

NANODOTS; NANOPATERNING; POROUS ALUMINA;

NANOSTRUCTURED MATERIALS;

EID: 34147223198     PISSN: 13869477     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physe.2006.12.008     Document Type: Article

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