Micro-machined WO3-based sensors with improved characteristics

Sensors and Actuators, B: Chemical

Volumn 140, Issue 2, 2009, Pages 356-362

  Khatko, V ^a   Vallejos, S ^a   Calderer, J ^b   Gracia, I ^c   Cane C ^c   Llobet, E ^a   Correig, X ^a  

^a UNIVERSITAT ROVIRA I VIRGILI   (Spain)

^b UNIVERSITAT POLITÈCNICA DE CATALUNYA   (Spain)

^c INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

Air pollutant oxidizing gases; Micro machined gas sensor; Selectivity

Indexed keywords

AIR POLLUTANT OXIDIZING GASES; DEPOSITION PROCESS; FILM DEPOSITION; HIGH SENSITIVITY; LIFT-OFF PROCESS; MICRO-MACHINED GAS SENSOR; OXIDIZING GAS; SELECTIVITY; SENSING FILMS; SENSING LAYERS; SPUTTERING POWER;

AIR POLLUTION; GAS DETECTORS; MICROSENSORS;

GASES;

EID: 67649367519     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2009.05.020     Document Type: Article

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