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Journal of Materials Science Letters

Volumn 17, Issue 11, 1998, Pages 891-894

Gas sensing property of SnO2 sputtered films deposited under different conditions

(5) Yamazaki, T a Shimazaki, T a Tereyama, K a Nakatani, N a Mohamed, G A b

a UNIVERSITY OF TOYAMA (Japan)

b Assiut University (Egypt)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL STRUCTURE; FILMS; GLOW DISCHARGES; HYDROGEN; MAGNETRON SPUTTERING; PRESSURE EFFECTS; SCANNING ELECTRON MICROSCOPY; SODIUM CHLORIDE; SUBSTRATES; THERMAL EFFECTS; TRANSMISSION ELECTRON MICROSCOPY; X RAY POWDER DIFFRACTION;

CRYSTALLINITY; TIN DIOXIDE;

OXIDES;

EID: 0032083730 PISSN: 02618028 EISSN: None Source Type: Journal
DOI: 10.1023/A:1026435816778 Document Type: Article

Times cited : (10)

References (15)

1
- 0030081792
- J. L. HUANG, D. W. KOU and B. Y. SHEW, Surf. Coat. Technol. 79 (1996) 263.
- (1996) Surf. Coat. Technol. , vol.79 , pp. 263
- Huang, J.L.¹ Kou, D.W.² Shew, B.Y.³

2
- 0028493243
- K. H. CHA, H. C. PARK and K. H. KIM, Sens. Actuators B 21 (1994) 91.
- (1994) Sens. Actuators B , vol.21 , pp. 91
- Cha, K.H.¹ Park, H.C.² Kim, K.H.³

3
- 0030259734
- G. MICOCCI, A. SERRA, P. CICILIANO, A. TEPORE and Z. A. ADIB, Vacuum 47 (1995) 1175.
- (1995) Vacuum , vol.47 , pp. 1175
- Micocci, G.¹ Serra, A.² Ciciliano, P.³ Tepore, A.⁴ Adib, Z.A.⁵

4
- 0026837131
- V. DEMARNE, A. GRISEL, R. SANJINES, D. ROSENFELD and F. LEVY, Sens. Actuators B 7 (1992) 704.
- (1992) Sens. Actuators B , vol.7 , pp. 704
- Demarne, V.¹ Grisel, A.² Sanjines, R.³ Rosenfeld, D.⁴ Levy, F.⁵

5
- 36449005374
- M. IPPOMMATSU, H. OHNISHI, H. SASAKI and T. MATSUMOTO, J. Appl. Phys. 69 (1991) 8368.
- (1991) J. Appl. Phys. , vol.69 , pp. 8368
- Ippommatsu, M.¹ Ohnishi, H.² Sasaki, H.³ Matsumoto, T.⁴

6
- 0025722457
- K. LOBER, M. LUDWIG and H. A. SCHNEIDER, Sens Actuators B 3 (1991) 69.
- (1991) Sens Actuators B , vol.3 , pp. 69
- Lober, K.¹ Ludwig, M.² Schneider, H.A.³

7
- 0025636886
- R. SANJINES, V. DEMARNE and F. LEVY, Thin Solid Films 193/194 (1990) 935.
- (1990) Thin Solid Films , vol.193-194 , pp. 935
- Sanjines, R.¹ Demarne, V.² Levy, F.³

8
- 0019569135
- R. B. COOPER, G. N. ADVANI and A. G. JORDAN, J. Electron. Mater. 10 (1981) 455.
- (1981) J. Electron. Mater. , vol.10 , pp. 455
- Cooper, R.B.¹ Advani, G.N.² Jordan, A.G.³

9
- 0031079018
- S. G. ANSARI, S. W. GOSAVI, S. A. GANGAL, R. N. KAREKAR and R. C. AIYER, J. Mater. Sci.: Mater. Electron. 8 (1997) 23.
- (1997) J. Mater. Sci.: Mater. Electron. , vol.8 , pp. 23
- Ansari, S.G.¹ Gosavi, S.W.² Gangal, S.A.³ Karekar, R.N.⁴ Aiyer, R.C.⁵

10
- 0026203322
- H. KIM and C. G. PARK, J. Electrochem. Soc. 138 (1991) 2408.
- (1991) J. Electrochem. Soc. , vol.138 , pp. 2408
- Kim, H.¹ Park, C.G.²

11
- 0027684954
- B. GAUTHERON, M. LABEAU, G. DEBABOUGLISE and U. SCHMATZ, Sens. Actuators B 15-16 (1993) 357.
- (1993) Sens. Actuators B , vol.15-16 , pp. 357
- Gautheron, B.¹ Labeau, M.² Debabouglise, G.³ Schmatz, U.⁴

12
- 0020139946
- H. OGAWA, M. NISHIKAWA and A. ABE, J. Appl. Phys. 53 (1982) 4448.
- (1982) J. Appl. Phys. , vol.53 , pp. 4448
- Ogawa, H.¹ Nishikawa, M.² Abe, A.³

13
- 0026208870
- G. SBERVEGLIERI, S. GROPPELLI, P. NELLI and A. CAMANZI, Sens. Actuators B 5 (1991) 253.
- (1991) Sens. Actuators B , vol.5 , pp. 253
- Sberveglieri, G.¹ Groppelli, S.² Nelli, P.³ Camanzi, A.⁴

14
- 0005996066
- in Japanese
- T. MIYOSHI and K. ONISAWA, J. Chem. Soc. Jpn. 150 (1984) 831 (in Japanese).
- (1984) J. Chem. Soc. Jpn. , vol.150 , pp. 831
- Miyoshi, T.¹ Onisawa, K.²

15
- 0016083153
- T. THORNTON, J. Vac. Sci. Technol. 11 (1974) 666.
- (1974) J. Vac. Sci. Technol. , vol.11 , pp. 666
- Thornton, T.¹

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