Laser micromachined high frequency ultrasonic arrays

Proceedings of the IEEE Ultrasonics Symposium

Volumn 2, Issue , 1999, Pages 1209-1212

  Lukacs, Marc ^a   Sayer, Michael ^a   Lockwood, Geoff ^a   Foster, Stuart ^a  

^a QUEEN S UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC PROPERTIES; ASPECT RATIO; DIELECTRIC PROPERTIES; EXCIMER LASERS; FREQUENCIES; INERT GASES; LASER APPLICATIONS; MICROMACHINING; PIEZOELECTRIC MATERIALS; SCANNING ELECTRON MICROSCOPY; STRUCTURE (COMPOSITION);

HIGH FREQUENCY ULTRASONIC ARRAYS; IMPEDANCE ANALYSER TECHNIQUES; LASER MICROMACHINING; PRE POLED CERAMIC STRUCTURE; PROJECTION ETCH; PULSE ECHO TECHNIQUES;

ULTRASONIC TRANSDUCERS;

EID: 0033293120     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)