Sidewall morphology of electroformed LIGA parts - Implications for friction, adhesion, and wear control

Journal of Microelectromechanical Systems

Volumn 14, Issue 2, 2005, Pages 326-334

  Hall, Aaron C ^a   Dugger, Mike T ^a   Prasad, Somuri V ^a   Christensen, Todd ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ATOMIC FORCE MICROSCOPY; COMPUTER AIDED DESIGN; ELECTRON BEAM LITHOGRAPHY; FRICTION; MOLECULAR WEIGHT; MORPHOLOGY; SCANNING ELECTRON MICROSCOPY; WEAR OF MATERIALS; X RAYS;

LIGA; MOLECULAR WEIGHT DETERMINATION; SIDEWALL MORPHOLOGY; WEAR CONTROL; X RAY ABSORBER MASK;

MICROELECTROMECHANICAL DEVICES;

EID: 18844397542     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.839125     Document Type: Article

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