LIGA microsystems: Surface interactions, tribology, and coatings

Journal of Manufacturing Processes

Volumn 6, Issue 1, 2004, Pages 107-116

  Prasad, Somuri V ^a   Dugger, Michael T ^a   Christenson, Todd R ^a   Tallant, David R ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Coatings; Diamond Like Coatings; LIGA; MEMS; Tribology

Indexed keywords

CERAMIC MATERIALS; COATINGS; COMPOSITE MATERIALS; FABRICATION; GALVANOMAGNETIC EFFECTS; LITHOGRAPHY; MORPHOLOGY; NANOSTRUCTURED MATERIALS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; TRIBOLOGY; X RAY ANALYSIS;

DIAMOND-LIKE COATINGS; LIGA; MICROFABRICATION; SIDEWALL MORPHOLOGY;

MICROELECTROMECHANICAL DEVICES;

EID: 4043057262     PISSN: 15266125     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1526-6125(04)70064-X     Document Type: Article

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