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Volumn 86, Issue 4-6, 2009, Pages 1216-1218

Impact of fabrication technology on flexural resonances of silicon nitride cantilevers

Author keywords

Cantilever; Silicon nitride; Undercut; Young's modulus

Indexed keywords

CANTILEVER; EULER-BERNOULLI BEAM THEORIES; FABRICATION TECHNOLOGIES; OPTICAL DEFLECTIONS; RELEASE METHODS; RESONANCE FREQUENCIES; UNDERCUT; YOUNG'S MODULUS;

EID: 67349267819     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.03.113     Document Type: Article
Times cited : (11)

References (14)
  • 12
    • 3843082844 scopus 로고    scopus 로고
    • R. Yahiaoui, A. Bosseboeuf, in: Fifth International Conference on EuroSim E, 2004, pp. 377-384.
    • R. Yahiaoui, A. Bosseboeuf, in: Fifth International Conference on EuroSim E, 2004, pp. 377-384.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.