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Volumn 86, Issue 4-6, 2009, Pages 1216-1218
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Impact of fabrication technology on flexural resonances of silicon nitride cantilevers
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Author keywords
Cantilever; Silicon nitride; Undercut; Young's modulus
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Indexed keywords
CANTILEVER;
EULER-BERNOULLI BEAM THEORIES;
FABRICATION TECHNOLOGIES;
OPTICAL DEFLECTIONS;
RELEASE METHODS;
RESONANCE FREQUENCIES;
UNDERCUT;
YOUNG'S MODULUS;
ATOMIC FORCE MICROSCOPY;
ELASTIC MODULI;
ELASTICITY;
NATURAL FREQUENCIES;
NONMETALS;
PLASMA ETCHING;
SILICON NITRIDE;
NANOCANTILEVERS;
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EID: 67349267819
PISSN: 01679317
EISSN: None
Source Type: Journal
DOI: 10.1016/j.mee.2009.03.113 Document Type: Article |
Times cited : (11)
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References (14)
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