SCOPUS 정보 검색 플랫폼

Microelectronic Engineering

Volumn 86, Issue 4-6, 2009, Pages 1216-1218

Impact of fabrication technology on flexural resonances of silicon nitride cantilevers

(5) Gavan, K Babaei a Westra, H J R a Van der Drift, E W J M a Venstra, W J a Van der Zant, H S J a

a DELFT UNIVERSITY OF TECHNOLOGY (Netherlands)

Author keywords

Cantilever; Silicon nitride; Undercut; Young's modulus

Indexed keywords

CANTILEVER; EULER-BERNOULLI BEAM THEORIES; FABRICATION TECHNOLOGIES; OPTICAL DEFLECTIONS; RELEASE METHODS; RESONANCE FREQUENCIES; UNDERCUT; YOUNG'S MODULUS;

ATOMIC FORCE MICROSCOPY; ELASTIC MODULI; ELASTICITY; NATURAL FREQUENCIES; NONMETALS; PLASMA ETCHING; SILICON NITRIDE;

NANOCANTILEVERS;

EID: 67349267819 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/j.mee.2009.03.113 Document Type: Article

Times cited : (11)

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