Anisotropic wet etching silicon tips of small opening angle in KOH solution with the additions of I2/KI

Sensors and Actuators, A: Physical

Volumn 152, Issue 1, 2009, Pages 75-79

  Han, Jianqiang ^a   Lu, Shaoyong ^a   Li, Qing ^a   Li, Xiaolu ^a   Wang, Jiangying ^a  

^a CHINA JILIANG UNIVERSITY   (China)

Author keywords

Atomic force microscopy; Convex corner undercutting; Probe; Silicon tip

Indexed keywords

ANISOTROPIC WET ETCHINGS; CONVEX CORNER UNDERCUTTING; CRYSTAL PLANES; DEEP TRENCHES; ETCHING RATES; ISO-PROPYL ALCOHOLS; KOH SOLUTIONS; NOVEL METHODS; OPENING ANGLES; POTASSIUM HYDROXIDE SOLUTIONS; SIDE WALLS; SILICON TIP;

ANISOTROPIC ETCHING; ANISOTROPY; ATOMIC FORCE MICROSCOPY; ATOMS; DRY ETCHING; NONMETALS; PLASMA ETCHING; POTASSIUM; POTASSIUM HYDROXIDE; PROBES; WALL FLOW;

WET ETCHING;

EID: 67349259176     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2009.03.008     Document Type: Review

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