Fabrication of microlens arrays using UV micro-stamping with soft roller and gas-pressurized platform

Microelectronic Engineering

Volumn 85, Issue 3, 2008, Pages 603-609

  Yang, Sen Yeu ^a   Cheng, Fang Sung ^a   Xu, Shu Wen ^a   Huang, Po Hsun ^a   Huang, Tzu Chien ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Gas pressurized platform; Microlens array; Soft roller; UV curable resin

Indexed keywords

MICROSTRUCTURE; POLYDIMETHYLSILOXANE; RESINS; ROLLERS (MACHINE COMPONENTS); ULTRAVIOLET RADIATION;

GAS PRESSURIZED PLATFORMS; MICROLENS ARRAYS; MICROSTRUCTURAL PATTERNS; ROLLER STAMPERS;

MICROLENSES;

EID: 39149118379     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.11.004     Document Type: Article

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