Gas barrier properties of diamond-like carbon films coated on PTFE

Applied Surface Science

Volumn 255, Issue 16, 2009, Pages 7286-7290

  Ozeki, K ^a   Nagashima, I ^a   Ohgoe, Y ^b   Hirakuri, K K ^b   Mukaibayashi, H ^c   Masuzawa, T ^a  

^a IBARAKI UNIVERSITY   (Japan)

^b TOKYO DENKI UNIVERSITY   (Japan)

^c IWAKI Co Ltd   (Japan)

Author keywords

Adhesive strength; Diamond like carbon; Gas barrier; Process pressure; PTFE

Indexed keywords

CARBON FILMS; CRACKS; DIAMOND LIKE CARBON FILMS; DIAMONDS; GASES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYTETRAFLUOROETHYLENES; SCANNING ELECTRON MICROSCOPY;

ADHESIVE STRENGTH; DIAMOND LIKE CARBON; GAS BARRIER; GAS BARRIER PROPERTIES; GAS PERMEATION PROPERTIES; POLYTETRAFLUOROETHYLENE (PTFE); PROCESS PRESSURE; RADIO FREQUENCY PLASMA;

GAS PERMEABLE MEMBRANES;

EID: 67349145717     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2009.03.082     Document Type: Article

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