Improvement of mechanical properties of amorphous carbon films deposited on polycarbonate plastics

Surface and Coatings Technology

Volumn 89, Issue 1-2, 1997, Pages 38-46

  Ong, H C ^a   Chang, R P H ^a   Baker, N ^b   Oliver, W C ^b  

^a Northwestern University   (United States)

^b Nano Instruments Inc   (United States)

Author keywords

Amorphous carbon film; Diamond like carbon film; Oxygen plasma treatment; Polycarbonate plastic

Indexed keywords

ATOMIC FORCE MICROSCOPY; CARBON; DEPOSITION; ELLIPSOMETRY; EMISSION SPECTROSCOPY; LASER ABLATION; OXYGEN; PLASMA APPLICATIONS; POLYCARBONATES; STRESS ANALYSIS; SUBSTRATES; SURFACE TREATMENT;

AMORPHOUS CARBON FILMS; OPTICAL EMISSION SPECTROSCOPY; OXYGEN PLASMA TREATMENT; SPECTROSCOPIC ELLIPSOMETRY;

AMORPHOUS FILMS;

EID: 0031070264     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(96)02898-8     Document Type: Article

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