Characterization of diamond-like carbon films formed by magnetically enhanced plasma chemical vapor deposition

Surface and Coatings Technology

Volumn 169-170, Issue , 2003, Pages 344-347

  Inagawa, K ^a   Zeniya, T ^a   Hibino, N ^a  

^a ULVAC INC   (Japan)

Author keywords

Diamondlike carbon film; Magnetically enhanced plasma chemical vapor deposition; Oxygen transmission rate; Plastic film; Roll coater; Tribological property

Indexed keywords

DECOMPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYETHYLENE TEREPHTHALATES; SILICON WAFERS;

ROLL COATER;

DIAMOND LIKE CARBON FILMS;

COATING; DIAMOND-LIKE CARBON; PLASMA TREATMENT; SURFACE TREATMENT; VAPOR DEPOSITION;

EID: 0038469666     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(03)00105-1     Document Type: Article

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