Step and flash imprint lithography for quantum dots based room temperature single electron transistor fabrication

Microelectronic Engineering

Volumn 86, Issue 4-6, 2009, Pages 646-649

  Cheam, Daw Don ^a   Karre, P Santosh Kumar ^a   Palard, Marylene ^b   Bergstrom, Paul L ^a  

^a MICHIGAN TECHNOLOGICAL UNIVERSITY   (United States)

^b The University of Texas at Austin   (United States)

Author keywords

Focused ion beam; Nanoimprint; Nanowire; Room temperature single electron transistors; Step and flash imprint lithography

Indexed keywords

DEPOSITION TECHNIQUES; FOCUS ION BEAMS; MONOLITHICALLY INTEGRATED; NANO-ELECTRONICS; NANOIMPRINT; PROCESS FLOWS; QD-BASED DEVICES; QUANTUM DOT ARRAYS; QUANTUM DOTS; ROOM TEMPERATURE SINGLE ELECTRON TRANSISTORS; STEP AND FLASH IMPRINT LITHOGRAPHY; ULTRA-LOW-POWER;

ELECTRONS; FOCUSED ION BEAMS; IONS; MONOLITHIC INTEGRATED CIRCUITS; NANOWIRES; OPTICAL WAVEGUIDES; SEMICONDUCTOR QUANTUM DOTS; TRANSIENTS; TRANSISTORS; TUNGSTEN;

NANOIMPRINT LITHOGRAPHY;

EID: 67349128057     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.12.094     Document Type: Article

References (15)

1. Beck M., et al. Microelectronic Engineering 61-62 (2002) 441-448
2. Chou S.Y., et al. Science 272 (1996) 85-87
3. Bailey T.C., et al. J. Photopolym. Sci. Tech. 15:3:481 (2002)
4. S.C. Jakeway et al., in: Proceedings of the International Conference on MEMS, NANO and Smart Systems, 2003.
5. Zhirnov V., et al. IEEE Circuits and Devices Magazine 21 3 (2005) 37-46
6. Karre P.S.K., et al. J. Appl. Phys. 102 (2007) 024316
7. Mahapatra S., et al. IEDM Tech. Dig. (2002) 323-326
8. D. Cheam et al., Nanotechnology 2008, in: Eighth IEEE Conference, vol. 18-21, 2008, pp. 175-178
9. I. McMackin et al., Proceedings of SPIE 5374:222 (2004).
10. V.V. Zhirnov et al., Proc. IEEE 91:1934 (2003).
11. Jung G.Y., et al. Nano Letters (2004)
12. Jun-ho Jeong et al., in: Proceedings of the 2004 International Conference on MEMS, NANO and Smart Systems, 2004.
13. Gaubert H.E., et al. Nanotechnology 18 (2007) 1351017
14. Cordan A.S., et al. Journal of Applied Physics 87:11 (2000)
15. Likharev K.K. Nano et Micro Technologies 3 (2003)