Rare-earth (Er, Nd)-doped Si nanostructures for integrated photonics

Physica E: Low-Dimensional Systems and Nanostructures

Volumn 41, Issue 6, 2009, Pages 1034-1039

  Gourbilleau, F ^a   Khomenkova, L ^a   Breard D ^a   Dufour, C ^a   Rizk, R ^a  

^a Direction de la Recherche Fondamentale   (France)

Author keywords

Rare earth; Reactive magnetron sputtering; Si nanocluster; Silicon photonics

Indexed keywords

ACTIVE MATERIALS; ANNEALING TREATMENTS; CO-DOPED; CONCENTRATION QUENCHING; DECAY TIME; DEPOSITION PARAMETERS; INTEGRATED PHOTONICS; PHOTOLUMINESCENCE PROPERTIES; RARE-EARTH; REACTIVE MAGNETRON CO-SPUTTERING; REACTIVE MAGNETRON SPUTTERING; SI NANOCLUSTER; SI NANOSTRUCTURES; SILICON NANOCRYSTALS; SILICON PHOTONICS; SILICON-RICH SILICON OXIDES; THERMAL TREATMENTS; TIME-RESOLVED;

ERBIUM; IONS; MAGNETRONS; NANOCLUSTERS; NEODYMIUM; NONMETALS; PHOTONIC DEVICES; QUENCHING; RARE EARTHS; SILICA; SILICON; SILICON COMPOUNDS; SODIUM COMPOUNDS; SPUTTER DEPOSITION;

SILICON OXIDES;

EID: 67349125901     PISSN: 13869477     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physe.2008.08.057     Document Type: Article

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