An electrostatic induction micromotor supported on gas-lubricated bearings

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 290-293

  Fréchette, Luc G ^b   Nagle, Steven F ^a   Ghodssi, Reza ^c   Umans, Stephen D ^a   Schmidt, Martin A ^a   Lang, Jeffrey H ^a  

^a USA   (United States)

^b Columbia University ^*  (United States)

^c UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC BREAKDOWN; ELECTROSTATICS; ENERGY CONVERSION; GAS LUBRICATED BEARINGS; REACTIVE ION ETCHING; SILICON WAFERS; TORQUE;

ELECTROSTATIC INDUCTION MICROMOTOR;

INDUCTION MOTORS;

EID: 0035008069     PISSN: 10846999     EISSN: None     Source Type: Journal    
DOI: 10.1109/MEMSYS.2001.906535     Document Type: Article

References (0)