Development of high-speed gas bearings for high-power density microdevices

Journal of Engineering for Gas Turbines and Power

Volumn 125, Issue 1, 2003, Pages 141-148

  Ehrich, F F ^a   Jacobson, S A ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; BONDING; ETCHING; ROTORS; SILICON; TURBOMACHINERY;

GAS BEARINGS; PERIPHERAL SPEED; POWER DENSITY; ROTATIONAL SPEEDS;

THRUST BEARINGS;

TURBINE;

EID: 0345951483     PISSN: 07424795     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.1498273     Document Type: Article

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