Resistivity measurement by dual-configuration four-probe method

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 2 A, 2003, Pages 695-699

  Yamashita, Masato ^a   Nishii, Toshifumi ^b   Mizutani, Hiroya ^b  

^a UNIVERSITY OF TOYAMA   (Japan)

^b Dia Instruments Co Ltd   (Japan)

Author keywords

Correction factor; Dual configuration four probe method; Resistivity; Sheet resistance; Single configuration four probe method

Indexed keywords

CONFORMAL MAPPING; GRAPHITE; PROBES; SEMICONDUCTING FILMS; SEMICONDUCTING INDIUM COMPOUNDS; THICKNESS MEASUREMENT;

CORRECTION FACTOR; DUAL-CONFIGURATION FOUR-PROBE METHOD; SHEET RESISTANCE; SINGLE-CONFIGURATION FOUR-PROBE METHOD;

ELECTRIC CONDUCTIVITY MEASUREMENT;

EID: 0037667832     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.695     Document Type: Article

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