메뉴 건너뛰기




Volumn 12, Issue 4, 2008, Pages 281-287

3-D surface profile measurement using an acousto-optic tunable filter based spectral phase shifting technique

Author keywords

Interferometry; Profilometry; Spectral phase shifting; Tunable filter; White light

Indexed keywords


EID: 66449125966     PISSN: 12264776     EISSN: None     Source Type: Journal    
DOI: 10.3807/JOSK.2008.12.4.281     Document Type: Article
Times cited : (20)

References (21)
  • 1
    • 17644423213 scopus 로고
    • Step height measurement using two wavelength phase shifting interferometry
    • K. Creath, "Step height measurement using two wavelength phase shifting interferometry," Appl. Opt., vol.26, no.14, pp. 2810-2816, 1993.
    • (1993) Appl. Opt. , vol.26 , Issue.14 , pp. 2810-2816
    • Creath, K.1
  • 2
    • 84928815585 scopus 로고
    • Digital phase-shifting interferometry: A simple error-compensating phase calculation algorithm
    • Hariharan P., Roeb. B and T. Eiju, "Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm," Appl. Opt., vol.26, no.13, pp. 2504-2506, 1987.
    • (1987) Appl. Opt. , vol.26 , Issue.13 , pp. 2504-2506
    • Hariharan, P.1    Roeb., B.2    Eiju, T.3
  • 3
    • 30344471039 scopus 로고    scopus 로고
    • White light on-axis digital holographic microscopy based on spectral phase shifting
    • D. Kim, J. W. You and S. Kim, "White light on-axis digital holographic microscopy based on spectral phase shifting," Opt. Exp., vol.14, no.1, pp. 229-234, 2006.
    • (2006) Opt. Exp. , vol.14 , Issue.1 , pp. 229-234
    • Kim, D.1    You, J.W.2    Kim, S.3
  • 4
    • 49749100249 scopus 로고    scopus 로고
    • Error analysis for optical security by means of 4-step phase-shifting digital holography
    • H. J. Lee and S. K. Gil, "Error Analysis for Optical Security by means of 4-Step Phase-Shifting Digital Holography," J. Opt. Soc. Korea, vol.10, no.3, pp. 118-123, 2006.
    • (2006) J. Opt. Soc. Korea , vol.10 , Issue.3 , pp. 118-123
    • Lee, H.J.1    Gil, S.K.2
  • 5
    • 70849132126 scopus 로고    scopus 로고
    • 3D nano object recognition based on phase measurement technique
    • D. Kim, B. J. Baek, Y. D. Kim and B. Javidi, "3D nano object recognition based on phase measurement technique," J. Opt. Soc. Korea, vol.11, no.3, pp. 108-112, 2007.
    • (2007) J. Opt. Soc. Korea , vol.11 , Issue.3 , pp. 108-112
    • Kim, D.1    Baek, B.J.2    Kim, Y.D.3    Javidi, B.4
  • 6
    • 0027654026 scopus 로고
    • Three-dimensional imaging by sub-Nyquist sampling of white-light interferomgrams
    • P. de Groot and L. Deck, "Three-dimensional imaging by sub-Nyquist sampling of white-light interferomgrams," Opt. Lett., vol 18, no.17, pp. 1462-1464, 1993.
    • (1993) Opt. Lett. , vol.18 , Issue.17 , pp. 1462-1464
    • De Groot, P.1    Deck, L.2
  • 7
    • 0023091195 scopus 로고
    • Digital phase-measuring interferometry with a tunable laser diode
    • Y. Ishii, J. Chen, and K. Murata, "Digital phase-measuring interferometry with a tunable laser diode," Opt. Lett., vol.12, no.4, pp. 233-235, 1988.
    • (1988) Opt. Lett. , vol.12 , Issue.4 , pp. 233-235
    • Ishii, Y.1    Chen, J.2    Murata, K.3
  • 8
    • 0015667946 scopus 로고
    • Two-wavelength interferometry
    • C. Polhemus, "Two-wavelength interferometry," Appl. Opt., vol.12, no.9, pp. 2071-2074, 1973.
    • (1973) Appl. Opt. , vol.12 , Issue.9 , pp. 2071-2074
    • Polhemus, C.1
  • 9
    • 84925486651 scopus 로고
    • Two-wavelength phase shifting interferometry
    • Y. Cheng and J. C. Wyant, "Two-wavelength phase shifting interferometry," Appl. Opt., vol.23, no.24, pp. 4539-4543, 1984.
    • (1984) Appl. Opt. , vol.23 , Issue.24 , pp. 4539-4543
    • Cheng, Y.1    Wyant, J.C.2
  • 10
    • 0001436862 scopus 로고    scopus 로고
    • Wavelength scanning digital interference holography for optical section imaging
    • M. K. Kim, "Wavelength scanning digital interference holography for optical section imaging," Opt. Lett., vol.24, no.23, pp. 1693-1695, 1999.
    • (1999) Opt. Lett. , vol.24 , Issue.23 , pp. 1693-1695
    • Kim, M.K.1
  • 11
    • 0037663324 scopus 로고    scopus 로고
    • Phase imaging without 2p ambiguity by multiwavelength digital holography
    • J. Gass, A. Dakoff, and M. K. Kim, "Phase imaging without 2p ambiguity by multiwavelength digital holography," Opt. Lett., vol.28, no.13, pp. 1141-1143, 2003.
    • (2003) Opt. Lett. , vol.28 , Issue.13 , pp. 1141-1143
    • Gass, J.1    Dakoff, A.2    Kim, M.K.3
  • 12
    • 0000932523 scopus 로고    scopus 로고
    • Wavelength scanning profilometry for real-time surface shape profiling
    • S. Kuwamura and I. Yamaguchi, "Wavelength scanning profilometry for real-time surface shape profiling," Appl. Opt., vol.37, no.19, pp. 4473-4482, 1997.
    • (1997) Appl. Opt. , vol.37 , Issue.19 , pp. 4473-4482
    • Kuwamura, S.1    Yamaguchi, I.2
  • 13
    • 0028756999 scopus 로고
    • Fourier-transform speckle profilometry: Three dimenstional shape measurements of diffuse objects with large height steps and/or spatially isolated surfaces
    • M. Takeda, and H. Yamamoto, "Fourier-transform speckle profilometry: three dimenstional shape measurements of diffuse objects with large height steps and/or spatially isolated surfaces," Appl. Opt., vol.33, no.34, pp. 7829-7837, 1994.
    • (1994) Appl. Opt. , vol.33 , Issue.34 , pp. 7829-7837
    • Takeda, M.1    Yamamoto, H.2
  • 14
    • 0001158008 scopus 로고    scopus 로고
    • Optical frequency-domain imaging microprofilometry with a frequency-tunable liquid-crystal Fabry-Perot etalon device
    • M. Kinoshita, M. Takeda, H. Yago, Y. Watanabe, and T. Kurokawa, "Optical frequency-domain imaging microprofilometry with a frequency-tunable liquid-crystal Fabry-Perot etalon device," Appl. Opt., vol.38, no.34, pp. 7063-7068, 1999.
    • (1999) Appl. Opt. , vol.38 , Issue.34 , pp. 7063-7068
    • Kinoshita, M.1    Takeda, M.2    Yago, H.3    Watanabe, Y.4    Kurokawa, T.5
  • 15
    • 0036867624 scopus 로고    scopus 로고
    • Measurement of the thickness profile of a transparent thin film deposited upon a pattern structure with an acousto-optic tunable filter
    • D. Kim, S. Kim, H. Kong and Y. Lee, "Measurement of the thickness profile of a transparent thin film deposited upon a pattern structure with an acousto-optic tunable filter," Opt. Lett., vol.27, no.21, pp. 1893-1895, 2002.
    • (2002) Opt. Lett. , vol.27 , Issue.21 , pp. 1893-1895
    • Kim, D.1    Kim, S.2    Kong, H.3    Lee, Y.4
  • 16
    • 9144246362 scopus 로고    scopus 로고
    • Direct spectral phase function calculation for dispersive interferometric thickness profilometry
    • D. Kim and S. Kim, "Direct spectral phase function calculation for dispersive interferometric thickness profilometry," Opt. Exp., vol.12, no.21, pp. 5117-5124, 2004.
    • (2004) Opt. Exp. , vol.12 , Issue.21 , pp. 5117-5124
    • Kim, D.1    Kim, S.2
  • 17
    • 0019927495 scopus 로고
    • Fouriertransform method of fringe-pattern analysis for computerbased topography and interferometry
    • M. Takeda, Hideki Ina and Seiji Kobayashi, "Fouriertransform method of fringe-pattern analysis for computerbased topography and interferometry, " J. Opt. Soc. Am., vol.72, no.1, pp. 156 -160, 1982.
    • (1982) J. Opt. Soc. Am. , vol.72 , Issue.1 , pp. 156-160
    • Takeda, M.1    Ina, H.2    Kobayashi, S.3
  • 18
    • 0028479462 scopus 로고
    • Dispersive interferometric profilometer
    • J. Schwider and L. Zhou, "Dispersive interferometric profilometer," Opt. Lett., vol.19, no.13, pp. 995-997, 1994.
    • (1994) Opt. Lett. , vol.19 , Issue.13 , pp. 995-997
    • Schwider, J.1    Zhou, L.2
  • 19
    • 0021374417 scopus 로고
    • Multi channel phase shifted interferometry
    • K. Osak Y, "Multi channel phase shifted interferometry," Opt. Lett., vol.9, no.2, pp. 59-61, 1984.
    • (1984) Opt. Lett. , vol.9 , Issue.2 , pp. 59-61
    • Osak, K.Y.1
  • 20
    • 0031673690 scopus 로고    scopus 로고
    • Punctuated quadrature phase-shifting interferometry
    • L. Deck and P. de Groot, "Punctuated quadrature phase-shifting interferometry," Opt. Lett., vol.23, no.1, pp. 19-21, 1998.
    • (1998) Opt. Lett. , vol.23 , Issue.1 , pp. 19-21
    • Deck, L.1    De Groot, P.2
  • 21
    • 0346548386 scopus 로고    scopus 로고
    • Potential of a wavelength sampling approach for profilometry by phase shifting interferometry
    • P. Sandoz, J. Calatroni and G. Ttribillon, "Potential of a wavelength sampling approach for profilometry by phase shifting interferometry," J. of Mod. Opt., vol.46, no.2, pp. 327-339, 1999.
    • (1999) J. of Mod. Opt. , vol.46 , Issue.2 , pp. 327-339
    • Sandoz, P.1    Calatroni, J.2    Ttribillon, G.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.