Optical frequency-domain imaging microprofilometry with a frequency-tunable liquid-crystal Fabry–Perot etalon device

Applied Optics

Volumn 38, Issue 34, 1999, Pages 7063-7068

  Kinoshita, Masaya ^a,d   Takeda, Mitsuo ^a   Yago, Haruo ^b,e   Watanabe, Yoshihiko ^b   Kurokawa, Takashi ^c,f  

^a UNIVERSITY OF ELECTRO COMMUNICATIONS   (Japan)

^b YAZAKI CORPORATION   (Japan)

^c NTT CORPORATION   (Japan)

^d SONY CORPORATION   (Japan)

^e Optowave Laboratory Inc   (Japan)

^f TOKYO UNIVERSITY OF AGRICULTURE AND TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001158008     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.38.007063     Document Type: Article

References (12)

1. G. E. Sommergren, “Optical heterodyne interferometry,” Appl. Opt. 20, 610-618 (1981).
2. T. Dressel, G. Hausler, and H. Venzke, “Three-dimensional sensing of rough surfaces by coherence radar,” Appl. Opt. 31, 919-925 (1992).
3. J. P. Fillard, Near Field Optics and Nanoscopy (World Scientific, Singapore, 1996), pp. 221-271.
4. M. Takeda and H. Yamamoto, “Fourier-transform speckle pro-filometry: three-dimensional shape measurements of a diffuse object with large height steps and/or spatially isolated surfaces,” Appl. Opt. 33, 7829-7837 (1994).
5. M. Takeda, H. Ina, and S. Kobayashi, “Fourier-transform method of fringe pattern analysis for computer-based topography and interferometry,” J. Opt. Soc. Am. 72, 156-160 (1982).
6. J. Schwider and L. Zhou, “Dispersive interferometric pro-filometer,” Opt. Lett. 19, 995-997 (1994).
7. T. H. Barnes, T. Eiju, and K. Matsuda, “Rough surface profile measurement using speckle optical frequency domain reflec-tometry with an external cavity tunable diode laser,” Optik 103, 93-100 (1996).
8. H. J. Tiziani, B. Franze, and P. Haible, “Wavelength-shift speckle interferometry for absolute profilometry using a mode-hop free external cavity diode laser,” J. Mod. Opt. 44, 1485-1496 (1997).
9. S. Kuwamura and I. Yamaguchi, “Wavelength scanning pro-filometry for real-time surface shape measurement,” Appl. Opt. 36, 4473-4482 (1997).
10. I. Yamaguchi, A. Yamamoto, and S. Kuwata, “Speckle decorrelation in surface profilometry by wavelength scanning interferometry,” Appl. Opt. 37, 6721-6728 (1998).
11. K. Hirabayshi, H. Tsuda, and T. Kurokawa, “Tunable liquid-crystal Fabry-Perot interferometer filter for wavelength-division multiplexing communication systems,” J. Lightwave Technol. 11, 2033-2043 (1993).
12. K. Hirabayshi and T. Kurokawa, “Liquid crystal devices for optical communication and information processing systems,” Liq. Cryst. 14, 307-313 (1993).