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Volumn 11, Issue 3, 2007, Pages 108-112

3D nano object recognition based on phase measurement technique

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Indexed keywords


EID: 70849132126     PISSN: 12264776     EISSN: None     Source Type: Journal    
DOI: 10.3807/JOSK.2007.11.3.108     Document Type: Article
Times cited : (7)

References (10)
  • 1
    • 71549132455 scopus 로고    scopus 로고
    • Marcel Dekker, New-York, USA, Correlation Pattern Recognition: An Optimum Approach
    • A. Mahalanobis, Image Recognition and Classification (Marcel Dekker, New-York, USA, 2002) Correlation Pattern Recognition: An Optimum Approach.
    • (2002) Image Recognition and Classification
    • Mahalanobis, A.1
  • 2
    • 0032002695 scopus 로고    scopus 로고
    • Three dimensional electro-optical correlation
    • J. Rosen, "Three dimensional electro-optical correlation," J. Opt. Soc. Am. A, vol. 15, pp. 430-436,. 1998.
    • (1998) J. Opt. Soc. Am. A , vol.15 , pp. 430-436
    • Rosen, J.1
  • 3
    • 0002425705 scopus 로고
    • Digital image formation from electronically detected holograms
    • J. W. Goodman and R. W. Lawrence, "Digital image formation from electronically detected holograms," Appl. Phy. Lett., vol. 11, pp. 77-79, 1967.
    • (1967) Appl. Phy. Lett. , vol.11 , pp. 77-79
    • Goodman, J.W.1    Lawrence, R.W.2
  • 4
    • 0001046849 scopus 로고    scopus 로고
    • Three-dimensional object recognition by use of digital holography
    • B. Javidi and E. Tajahuerce, "Three-dimensional object recognition by use of digital holography," Opt. Lett., vol. 25, pp. 610-612, 2000.
    • (2000) Opt. Lett. , vol.25 , pp. 610-612
    • Javidi, B.1    Tajahuerce, E.2
  • 5
    • 13144277607 scopus 로고    scopus 로고
    • Three-dimensional-object recognition by use of single-exposure on-axis digital holography
    • B. Javidi and D. Kim, "Three-dimensional-object recognition by use of single-exposure on-axis digital holography," Opt. Lett., vol. 30, pp. 236-238, 2005.
    • (2005) Opt. Lett. , vol.30 , pp. 236-238
    • Javidi, B.1    Kim, D.2
  • 7
    • 0040158811 scopus 로고    scopus 로고
    • Normal-incidence spectroscopic ellipsometry for critical dimension monitoring
    • DOI 10.1063/1.1378807
    • H. Huang and F. Terry, "Normal incidence spectroscopic ellipsometry for critical dimension monitoring," App. Phy. Lett, vol. 78, pp. 3983-3985, 2001. (Pubitemid 33599482)
    • (2001) Applied Physics Letters , vol.78 , Issue.25 , pp. 3983-3985
    • Huang, H.-T.1    Kong, W.2    Terry Jr., F.L.3
  • 8
    • 33749122289 scopus 로고    scopus 로고
    • Mathematical modeling of indirect measurements in scatterometry
    • H. Gross et al, "Mathematical modeling of indirect measurements in scatterometry," Measurement, vol. 39, pp. 782-794, 2006.
    • (2006) Measurement , vol.39 , pp. 782-794
    • Gross, H.1
  • 9
    • 0029307028 scopus 로고
    • Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings
    • M. G. Moharam, E. B. Grann, D. A. Pommet, and T. K. Gaylord, "Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings," J. Opt. Soc. Am. A, 12, pp. 1068-1076, 1995.
    • (1995) J. Opt. Soc. Am. A , vol.12 , pp. 1068-1076
    • Moharam, M.G.1    Grann, E.B.2    Pommet, D.A.3    Gaylord, T.K.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.