Punctuated quadrature phase-shifting interferometry

Optics Letters

Volumn 23, Issue 1, 1998, Pages 19-21

  Deck, Leslie L ^a   De Groot, Peter J ^a  

^a ZYGO CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; CAMERA SHUTTERS; CAMERAS; MEASUREMENT ERRORS; VIBRATIONS (MECHANICAL);

PHASE SHIFTER; PHASE SHIFTING INTERFEROMETRY; QUADRATURE;

INTERFEROMETRY;

EID: 0031673690     PISSN: 01469592     EISSN: None     Source Type: Journal    
DOI: 10.1364/OL.23.000019     Document Type: Article

References (6)

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3. R. Smythe and R. Moore, Opt. Eng. 23, 361 (1984).
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5. L. Deck, Appl. Opt. 35, 6655 (1996).
6. P. de Groot, J. Opt. Soc. Am. 12, 354 (1995).