Wavelength scanning profilometry for real-time surface shape measurement

Applied Optics

Volumn 36, Issue 19, 1997, Pages 4473-4482

  Kuwamura, Susumu ^a   Yamaguchi, Ichirou ^a  

^a INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

Author keywords

Interferometry; Profilometry; Real time; Spectral speckle decorrelation; Surface shape measurement; Wavelength scan

Indexed keywords

EID: 0000932523     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.36.004473     Document Type: Article

References (21)

1. N. A. Massie, “Real-time digital heterodyne interferometry: a system,” Appl. Opt. 19, 154-160 (1980).
2. J. Kato and I. Yamaguchi, “Real-time fringe analysis based on electronic moire and its applications,” in Fringe ’93, Proceedings of the Second International Workshop on Automatic Processing of Fringe Patterns, W. Juptner and W. Osten, eds. (Akademie Verlag, Berlin, 1993), pp. 66-71.
3. D. M. Meadows, W. O. Johnson, and J. B. Allen, “Generation of surface contours by moire patterns,” Appl. Opt. 9, 942-947 (1970).
4. M. Takeda and K. Mutoh, “Fourier transform profilometry for the automatic measurement of 3-D object shapes,” Appl. Opt. 9, 3977-3982 (1983).
5. C. Polhemus, “Two-wavelength interferometry,” Appl. Opt. 12, 2071-2074 (1973).
6. A. F. Fercher, H. Z. Hu, and U. Vry, “Rough surface inter-ferometry with a two-wavelength heterodyne speckle interferometer,” Appl. Opt. 24, 2181-2188 (1985).
7. T. Dresel, G. Hauslar, and H. Venzke, “Three-dimensional sensing of rough surfaces by coherence radar,” Appl. Opt. 31, 919-925 (1992).
8. M. Takeda and H. Yamamoto, “Fourier-transform speckle pro-filometry: three-dimensional shape measurements of diffuse objects with large height steps and/or spatially isolated surfaces,” Appl. Opt. 33, 7829-7837 (1994).
9. T. Yatagai, “Recent progresses in white light interferometry,” in New Techniques and Analysis in Optical Measurements, M. Kujawmska and K. Patorski, eds., Proc. SPIE. 2340, 338-345 (1994).
10. H. Kikuta, K. Iwata, and R. Nagata, “Distance measurement by the wavelength shift of laser diode light,” Appl. Opt. 25, 2976-2980 (1986).
11. T. Kobayashi, “Interferometry for measuring distance and displacement using semiconductor lasers,” Kogaku (Jpn. J. Opt.) 17, 279-284 (1988).
12. M. Suematsu and M. Takeda, “Wavelength-shift interferome-try for distance measurements using the Fourier transform technique for fringe analysis,” Appl. Opt. 30, 4046-4055 (1991).
13. L. Deck and P. de Groot, “High-speed noncontact profiler based on scanning white-light interferometry,” Appl. Opt. 33, 7334-7338 (1994).
14. P. de Groot and L. Deck, “Surface profiling by analysis of white-light interferograms in the spatial frequency domain,” J. Mod. Opt. 42, 389-401 (1995).
15. J. C. Marron and K. S. Schroeder, “Three-dimensional lensless imaging using laser frequency diversity,” Appl. Opt. 31, 255-262 (1992).
16. J. C. Marron and K. S. Schroeder, “Holographic laser radar,” Opt. Lett. 18, 385-387 (1993).
17. W. G. Driscoll and W. Vaughan, eds., Handbook of Optics (McGraw-Hill, New York, 1978), Chap. 2.
18. N. George, A. Jain, and R. D. S. Melville, Jr., “Experiments on the space and wavelength dependence of speckle,” Appl. Opt. 7, 157-169 (1975).
19. J. C. Marron, “Wavelength decorrelation of laser speckle from three-dimensional diffuse objects,” Opt. Commun. 88, 305-308 (1992).
20. L. G. Shirley, and P. A. Lo, “Bispectral analysis of the wavelength dependence of speckle: remote sensing of object shape,” J. Opt. Soc. Am. A 11, 1025-1046 (1994).
21. S. Wada, K. Akagawa, and H. Tashiro, “Electronically tuned Ti:sapphire laser,” Opt. Lett. 21, 731-733 (1996).