Chemical shift of electron energy-loss near-edge structure on the nitrogen K-edge and titanium L3-edge at TiN/Ti interface

Microscopy and Microanalysis

Volumn 15, Issue 2, 2009, Pages 106-113

  Terada, Shohei ^a   Asayama, Kyoichiro ^b   Tsujimoto, Masahiko ^c   Kurata, Hiroki ^c   Isoda, Seiji ^c  

^a HITACHI LTD   (Japan)

^b RENESAS TECHNOLOGY CORP   (Japan)

^c KYOTO UNIVERSITY   (Japan)

Author keywords

Chemical shift; Electron energy loss near edge structure (ELNES); First principles band structure calculation; Interface; Spatially resolved EELS; Time resolved acquisition technique; Titanium nitride

Indexed keywords

NANOMATERIAL; NITROGEN; TITANIUM; TITANIUM NITRIDE;

ARTICLE; CHEMISTRY; ELECTRON ENERGY LOSS SPECTROSCOPY; EVALUATION; METHODOLOGY; ULTRASTRUCTURE;

NANOSTRUCTURES; NITROGEN; SPECTROSCOPY, ELECTRON ENERGY-LOSS; TITANIUM;

EID: 66349127204     PISSN: 14319276     EISSN: 14358115     Source Type: Journal    
DOI: 10.1017/S1431927609090175     Document Type: Article

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