Time-resolved acquisition technique for spatially-resolved electron energy-loss spectroscopy by energy-filtering TEM

Journal of Electron Microscopy

Volumn 51, Issue 5, 2002, Pages 291-296

  Terada, Shohei ^a   Aoyama, Takashi ^a   Yano, Fumiko ^a   Mitsui, Yasuhiro ^a  

^a HITACHI LTD   (Japan)

Author keywords

EF TEM; Si SiO2; Spatially resolved EELS; Time resolved acquisition

Indexed keywords

ARTICLE;

DISSOCIATION; ELECTRON EMISSION; ELECTRON ENERGY LEVELS; ELECTRON SCATTERING; ENERGY DISSIPATION; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; IMAGE ENHANCEMENT; SIGNAL TO NOISE RATIO;

EF-TEM; ELECTRON ENERGY-LOSS SPECTROSCOPIES; ENERGY-FILTERING TEM; ENERGY-FILTERING TRANSMISSION ELECTRON MICROSCOPIES; SI/SIO2; SPATIALLY RESOLVED; SPATIALLY-RESOLVED EELS; SPECTRAL IMAGES; TIME-RESOLVED; TIME-RESOLVED ACQUISITION;

ELECTRON ENERGY LOSS SPECTROSCOPY;

EID: 0036412805     PISSN: 00220744     EISSN: None     Source Type: Journal    
DOI: 10.1093/jmicro/51.5.291     Document Type: Article

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