Mechanical properties of gradient and multilayered TiAlSiN hard coatings

Thin Solid Films

Volumn 517, Issue 17, 2009, Pages 4934-4937

  Chang, Yin Yu ^a   Yang, Shun Jan ^b   Wu, Weite ^b   Kuo, Yu Chu ^c   Lee, Jyh Wei ^d   Wang, Chaur Jeng ^c  

^a MINGDAO UNIVERSITY   (Taiwan)

^b NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

^c NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

^d TUNGNAN UNIVERSITY   (Taiwan)

Author keywords

Hard coating; Mechanical properties; Physical vapor deposition; Thin films

Indexed keywords

ARC EVAPORATION; COATING PROPERTIES; CONTENT RATIO; INDIVIDUAL COMPONENTS; MULTI-COMPONENT COATINGS; MULTI-LAYERED; NANO GRAINS; NON-METALLIC ELEMENTS; TI-AL-N; TIALSIN;

GRAIN BOUNDARIES; HARD COATINGS; MECHANICAL PROPERTIES; METALLIC COMPOUNDS; SILICON; THIN FILMS; VAPORS;

ALUMINUM;

EID: 65849463259     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.03.036     Document Type: Article

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