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Volumn 54, Issue 22, 2009, Pages 5171-5178
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High-throughput study of the anodic oxidation of Hf-Ti thin films
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Author keywords
Anodic oxide film; Combinatorial libraries; High throughput experimentation; Scanning droplet cell
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Indexed keywords
ANODIC OXIDE FILM;
ANODIC OXIDES;
AUTOMATIC SCANNING;
COMBINATORIAL LIBRARIES;
COMBINATORIAL THIN FILMS;
COMPREHENSIVE STUDIES;
COSPUTTERING;
DIELECTRIC CONSTANTS;
DONOR DENSITY;
ELECTROCHEMICAL INVESTIGATIONS;
FILM FORMATIONS;
FLAT BAND POTENTIAL;
HIGH-THROUGHPUT;
HIGH-THROUGHPUT EXPERIMENTATION;
IMPEDANCE MEASUREMENT;
MOTT-SCHOTTKY ANALYSIS;
OXIDE PROPERTIES;
PARENT METAL;
POTENTIODYNAMIC SCANS;
QUANTITATIVE DETERMINATIONS;
SCANNING DROPLET CELL;
STRUCTURE PROPERTY;
TI ALLOYS;
TI THIN FILMS;
XRD;
ANODIC OXIDATION;
DROP FORMATION;
HAFNIUM;
LIBRARIES;
SCANNING;
THIN FILMS;
TITANIUM ALLOYS;
OXIDE FILMS;
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EID: 65749088313
PISSN: 00134686
EISSN: None
Source Type: Journal
DOI: 10.1016/j.electacta.2009.01.016 Document Type: Article |
Times cited : (21)
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References (26)
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