Transparent amorphous In-Ga-Zn-O thin film as function of various gas flows for TFT applications

Thin Solid Films

Volumn 517, Issue 14, 2009, Pages 4078-4081

  Jung, C H ^a   Kim, D J ^b   Kang, Y K ^b   Yoon, D H ^a,b  

^a Sungkyunkwan University   (South Korea)

^b Sungkyunkwan University   (South Korea)

Author keywords

a IGZO; Oxide TFTs; Transparent amorphous oxide semiconductor

Indexed keywords

A-IGZO; CHANNEL LAYERS; ELECTRICAL AND OPTICAL PROPERTIES; GAS FLOWS; INDIUM GALLIUM ZINC OXIDES; ON/OFF RATIOS; OPTICAL TRANSMITTANCES; RADIO FREQUENCY MAGNETRON SPUTTERING; ROOM TEMPERATURES; TRANSPARENT AMORPHOUS OXIDE SEMICONDUCTOR; VISIBLE WAVELENGTHS;

AERODYNAMICS; AMORPHOUS FILMS; ARGON; CARRIER CONCENTRATION; CARRIER MOBILITY; ELECTRIC CONDUCTIVITY; FLOW OF GASES; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; OXIDE FILMS; SEMICONDUCTOR MATERIALS; THIN FILM TRANSISTORS; THIN FILMS; ZINC; ZINC OXIDE;

OPTICAL FILMS;

EID: 65449141259     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.01.166     Document Type: Article

References (17)

1. Fortunato E., Barquinha P., Pimentel A., Pereira L., Goncalves G., and Martins R. Phys. Status Solidi 1 (2007) R34
2. Wang Y.L., Ren F., Lim W., Norton D.P., Peaton S.J., Kravchenko I.I., and Zavada J.M. Appl. Phys. Lett. 90 (2007) 242103
3. Chiang H.Q., Wager J.F., Hoffman R.L., Jeong J., and Keszler D.A. Appl. Phys. Lett. 86 (2005) 013503
4. Gorrn P., Holzer P., Riedl T., Kowalsky W., Wang J., Weimann T., Hinze P., and Kipp S. Appl. Phys. Lett. 90 (2007) 063502
5. Nomura K., Ohta H., Takagi A., Kamiya T., Hirano M., and Hosono H. Nature 432 (2004) 488
6. Iwasaki T., ltagaki N., Den T., Kumomi H., Nomura K., Kamiya T., and Hosono H. Appl. Phys. Lett. 90 (2007) 242114
7. Yabuta H., Sano M., Abe K., Aiba T., Den T., Kumomi H., Nomura K., Kamiya T., and Hosono H. Appl. Phys. Lett. 89 (2006) 112123
8. Park J.-S., Jeong J.K., Mo Y.-G., Kim H.-D., and Kim S.-I. Appl. Phys. Lett. 90 (2007) 262106
9. Jeong J.K., Jeong J.H., Yang H.W., Park J.-S., Mo Y.-G., and Kim H.D. Appl. Phys. Lett. 91 (2007) 113505
10. Fortunato E., Pereira L., Barquinha P., Rego A., Goncalves G., Vila A., Morante J., and Martins R. Appl. Phys. Lett. 92 (2008) 222103
11. Dimitrakopoulos C.D., and Mascaro D.J. IBM J. Res. Develop. 45 (2001) 11
12. Hosono H. J. Non-Cryst. Solids 352 (2006) 851
13. Kim D.-G., Lee S., Lee G.-H., and Kwon S.-C. Thin Solid Films 515 (2007) 6949
14. Takagi A., Nomura K., Ohta H., Yanagi H., Kamiya T., Hirano M., and Hosono H. Thin Solid Films 486 (2005) 38
15. Park J.-S., Jeong J.K., Chung H.-J., Mo Y.-G., and Kim H.D. Appl. Phys. Lett. 92 (2008) 072104
16. Na J.H., Kitamura M., and Arakawa Y. Appl. Phys. Lett. 93 (2008) 063501
17. Das R., Adhikary K., and Ray S. Appl. Surf. Sci. 253 (2007) 6068