Fabrication of metallic nano stamp to replicate patterned substrate using electron-beam recording, nanoimprinting, and electroforming

IEEE Transactions on Magnetics

Volumn 45, Issue 5, 2009, Pages 2304-2307

  Kim, Hokwan ^a   Shin, Sang Chul ^a   Han, Jungjin ^a   Han, Jeongwon ^a   Kang, Shinill ^a  

^a Yonsei University   (South Korea)

Author keywords

Electron beam recording (EBR); Fluoroctatrichlorosilane; Metallic nano stamp; Nanoelectroforming; Nanoimprinting; Sulfamate solution

Indexed keywords

COST EFFECTIVENESS; ELECTRON BEAMS; INDUCTIVELY COUPLED PLASMA; MOLDS; NANOIMPRINT LITHOGRAPHY; NICKEL; OPTICAL DISK STORAGE; POLYMERS; SELF ASSEMBLED MONOLAYERS; SUBSTRATES;

ELECTRON BEAM RECORDING; FLUOROCTATRICHLOROSILANE; NANO-IMPRINTING; NANOELECTROFORMING; SULFAMATES;

FABRICATION;

EID: 65349192203     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2009.2016476     Document Type: Article

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