Realization of silicon nitride template for nanoimprint: A first result

Solid State Phenomena

Volumn 121-123, Issue PART 1, 2007, Pages 669-672

  Liu, Zewen ^a   Zhang, Tian Ruo ^a   Liu, Litian ^a   Li, Zhijian ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Dry etching; Nanoimprint.photol ithography; Silicon nitride; Templates; Wet etching

Indexed keywords

DRY ETCHING; SILICON NITRIDE; WET ETCHING;

DRY ETCHING MASK; PECVD SILICON OXIDE SANDWICH LAYER;

NANOIMPRINT LITHOGRAPHY;

ETCHING; LITHOGRAPHY;

EID: 38549105135     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: 10.4028/3-908451-30-2.669     Document Type: Conference Paper

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