Nano chamber fabrication on an acrylic plate by direct nano imprint lithography using quartz mold

2001 International Microprocesses and Nanotechnology Conference, MNC 2001

Volumn , Issue , 2001, Pages 104-105

  Hirai, Y ^a   Takagi, N ^a   Toyota, H ^b   Harada, S ^a   Yotsuya, T ^b   Tanaka, Y ^a  

^a Osaka Prefecture University   (Japan)

^b OSAKA SCIENCE AND TECHNOLOGY CENTER   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; MOLDS; NANOSTRUCTURES; NANOTECHNOLOGY; PLATES (STRUCTURAL COMPONENTS); QUARTZ;

ACRYLIC PLATES; ANTI-REFLECTION STRUCTURES; CHAMBER FABRICATION; DNA ANALYSIS; ELECTRIC DEVICES; LOW COSTS; NANOHOLES; NANOSTRUCTURE FABRICATION;

NANOIMPRINT LITHOGRAPHY;

EID: 4344644322     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IMNC.2001.984110     Document Type: Conference Paper

References (3)

1. S.Chou, et al., "Nanoimprint lithography", J. Vac. Sci. Technol. B14, pp.4129-4133,1996.
2. H.Toyota, et al.,"Fabrication of microcone array for antireflection structured surface using metal dotted pattern," Jpn. J. Appl. Phys. (accepted for publication).
3. Y.Hirai, et al., "Mold Surface Treatment for Imprint Lithography", J. Photopolym. Sci. Technol., 14, pp.457-46, 2001.