Study of the thermal decomposition of "captured" intermediates in the CVD of ZnO from DEZ and H2O by TGA-DTA and quadrupole mass spectroscopy

Journal of Crystal Growth

Volumn 311, Issue 9, 2009, Pages 2731-2735

  Velasco, Angelito ^a   Oguchi, Tatsuo ^a   Kim, Hee Joon ^a  

^a TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

A1. Thermal decomposition; A3. Chemical vapor deposition; B1. Zinc compounds

Indexed keywords

A1. THERMAL DECOMPOSITION; A3. CHEMICAL VAPOR DEPOSITION; B1. ZINC COMPOUNDS; DIETHYLZINC; ENDOTHERMIC PEAKS; PEAK TEMPERATURES; QUADRUPOLE MASS SPECTROMETERS; QUADRUPOLE MASS SPECTROSCOPIES; REACTION INTERMEDIATES; REACTOR TEMPERATURES; ROOM TEMPERATURES; THERMOGRAVIMETRIC ANALYSIS AND DIFFERENTIAL THERMAL ANALYSIS; VOLATILE COMPONENTS; WATER-COOLED SUBSTRATES; ZNO;

CHEMICAL VAPOR DEPOSITION; DIFFERENTIAL THERMAL ANALYSIS; MASS SPECTROMETERS; MASS SPECTROMETRY; PHOTORESISTS; PYROLYSIS; SEMICONDUCTING ZINC COMPOUNDS; TRANSITION METAL COMPOUNDS; VAPORS; WATER ANALYSIS; WATER VAPOR; ZINC; ZINC OXIDE;

THERMOGRAVIMETRIC ANALYSIS;

EID: 65349167759     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2009.02.022     Document Type: Article

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