메뉴 건너뛰기




Volumn 24, Issue 4, 2009, Pages 1498-1512

The effect of boron doping and gamma irradiation on the structure and properties of microwave chemical vapor deposited boron-doped diamond films

Author keywords

[No Author keywords available]

Indexed keywords

ACCEPTOR CONCENTRATIONS; ACTIVE ACCEPTORS; BOROCARBIDE; BORON CONCENTRATIONS; BORON-DOPED DIAMOND FILMS; BORON-DOPED DIAMONDS; BORON-DOPING; CHEMICAL VAPOR DEPOSITED; COLD NEUTRONS; COMPTON; DIAMOND SURFACES; DIAMOND THIN FILMS; ELECTRICAL MEASUREMENT TECHNIQUES; ELECTRICAL PROPERTIES; ELECTRONIC BEHAVIORS; ELECTRONIC DEVICES; FILM DEPOSITIONS; GAMMA IRRADIATIONS; HYDROGEN MIGRATIONS; MATERIAL PROCESSING; MICRO-RAMAN SPECTROSCOPIES; MICROWAVE PLASMA-ASSISTED CHEMICAL VAPOR DEPOSITIONS; POST IRRADIATIONS; SCATTERED ELECTRONS; STRUCTURE AND PROPERTIES; X- RAY DIFFRACTIONS; X-RAY PHOTOELECTRON SPECTROSCOPIES;

EID: 65349112587     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2009.0170     Document Type: Article
Times cited : (16)

References (46)
  • 6
    • 2342614816 scopus 로고    scopus 로고
    • Electrochemical performance of diamond thin-film electrodes from different commercial sources
    • A.E. Fischer, Y. Show, and G.M. Swain: Electrochemical performance of diamond thin-film electrodes from different commercial sources. Anal. Chem. 76, 2553 (2004).
    • (2004) Anal. Chem , vol.76 , pp. 2553
    • Fischer, A.E.1    Show, Y.2    Swain, G.M.3
  • 7
    • 27844487584 scopus 로고    scopus 로고
    • Nanosecond semiconductor diodes for pulsed power switching
    • I.V. Grekhov and G.A. Mesyats: Nanosecond semiconductor diodes for pulsed power switching. Physics-Uspekhi 48,703 (2005).
    • (2005) Physics-Uspekhi , vol.48 , pp. 703
    • Grekhov, I.V.1    Mesyats, G.A.2
  • 8
    • 0032662870 scopus 로고    scopus 로고
    • RD42 Collaboration: Review of the development of diamond radiation sensors. Nucl. Instrum. Methods Phys. Res, Sect. A 434, 131 1999
    • RD42 Collaboration: Review of the development of diamond radiation sensors. Nucl. Instrum. Methods Phys. Res., Sect. A 434, 131 (1999).
  • 9
    • 33745248727 scopus 로고    scopus 로고
    • Recent improvements on the use of CVD diamond ionization chambers for radiotherapy applications
    • M.J. Guerrero, D. Tromson, C. Descamp, and P. Bergonzo: Recent improvements on the use of CVD diamond ionization chambers for radiotherapy applications. Diamond Relat. Mater. 15, 811 (2006).
    • (2006) Diamond Relat. Mater , vol.15 , pp. 811
    • Guerrero, M.J.1    Tromson, D.2    Descamp, C.3    Bergonzo, P.4
  • 10
    • 0033811107 scopus 로고    scopus 로고
    • Diamond detectors in particle physics
    • R.J. Tapper: Diamond detectors in particle physics. Rep. Prog. Phys. 63, 1273 (2000).
    • (2000) Rep. Prog. Phys , vol.63 , pp. 1273
    • Tapper, R.J.1
  • 12
    • 0031078739 scopus 로고    scopus 로고
    • Loss of electrical conductivity in boron-doped diamond due to ion-induced damage
    • R. Kalish, C.U. Saguy, B. Philosoph, V. Richter, and S. Prawer: Loss of electrical conductivity in boron-doped diamond due to ion-induced damage. Appl. Phys. Lett. 70, 999 (1997).
    • (1997) Appl. Phys. Lett , vol.70 , pp. 999
    • Kalish, R.1    Saguy, C.U.2    Philosoph, B.3    Richter, V.4    Prawer, S.5
  • 13
    • 0035827258 scopus 로고    scopus 로고
    • Ultraviolet emission from a diamond pn junction
    • S. Koizumi, K. Watanabe, M. Hasegawa, and H. Kanda: Ultraviolet emission from a diamond pn junction. Science 292,1899 (2001).
    • (2001) Science , vol.292 , pp. 1899
    • Koizumi, S.1    Watanabe, K.2    Hasegawa, M.3    Kanda, H.4
  • 14
    • 33748706998 scopus 로고    scopus 로고
    • High-performance metal-semiconductor-metal deep-ultraviolet photodetectors based on homoepitaxial diamond thin film
    • M.Y. Liao, Y. Koide, and J. Alvarez: High-performance metal-semiconductor-metal deep-ultraviolet photodetectors based on homoepitaxial diamond thin film. Appl. Phys. Lett. 89, 113509 (2006).
    • (2006) Appl. Phys. Lett , vol.89 , pp. 113509
    • Liao, M.Y.1    Koide, Y.2    Alvarez, J.3
  • 16
    • 0001288870 scopus 로고    scopus 로고
    • Microstructural studies of diamond thin films grown by electron cyclotron resonance-assisted chemical vapor deposition
    • S. Gupta, R.S. Katiyar, D.R. Gilbert, R.K. Singh, and G. Morell: Microstructural studies of diamond thin films grown by electron cyclotron resonance-assisted chemical vapor deposition. J. Appl. Phys. 88, 5695 (2000).
    • (2000) J. Appl. Phys , vol.88 , pp. 5695
    • Gupta, S.1    Katiyar, R.S.2    Gilbert, D.R.3    Singh, R.K.4    Morell, G.5
  • 18
    • 0035449988 scopus 로고    scopus 로고
    • The search for donors in diamond
    • R. Kalish: The search for donors in diamond. Diamond Relat. Mater. 10, 1749 (2001).
    • (2001) Diamond Relat. Mater , vol.10 , pp. 1749
    • Kalish, R.1
  • 19
    • 0038675603 scopus 로고    scopus 로고
    • Synthesis and characterization of sulfur-incorporated microcrystalline diamond and nano-crystalline carbon thin films by hot filament chemical vapor deposition
    • S. Gupta, B.R. Weiner, and G. Morell: Synthesis and characterization of sulfur-incorporated microcrystalline diamond and nano-crystalline carbon thin films by hot filament chemical vapor deposition. J. Mater. Res. 18, 363 (2003).
    • (2003) J. Mater. Res , vol.18 , pp. 363
    • Gupta, S.1    Weiner, B.R.2    Morell, G.3
  • 21
    • 0141921775 scopus 로고    scopus 로고
    • Optical and electronic properties of heavily boron-doped homo-epitaxial diamond
    • E. Bustarret, E. Gheeraert, and K. Watanabe: Optical and electronic properties of heavily boron-doped homo-epitaxial diamond. Phys. Status Solidi A 199, 9 (2003).
    • (2003) Phys. Status Solidi A , vol.199 , pp. 9
    • Bustarret, E.1    Gheeraert, E.2    Watanabe, K.3
  • 22
    • 4944257246 scopus 로고    scopus 로고
    • 2-bonded nondiamond carbon impurity on the response of boron-doped polycrystalline diamond thin-film electrodes
    • 2-bonded nondiamond carbon impurity on the response of boron-doped polycrystalline diamond thin-film electrodes. J. Electrochem. Soc. 151, E306 (2004).
    • (2004) J. Electrochem. Soc , vol.151
    • Bennett, J.A.1    Wang, J.2    Show, Y.3    Swain, G.M.4
  • 23
    • 9944252516 scopus 로고    scopus 로고
    • Modeling of diamond radiation detectors
    • L. Milazzo and A. Mainwood: Modeling of diamond radiation detectors. J. Appl. Phys. 96, 5845 (2004).
    • (2004) J. Appl. Phys , vol.96 , pp. 5845
    • Milazzo, L.1    Mainwood, A.2
  • 25
    • 18644372217 scopus 로고    scopus 로고
    • Electron field emission properties of gamma irradiated microcrystalline diamond and nanocrystalline carbon thin films
    • S. Gupta, B.L. Weiss, B.R. Weiner, L. Pilione, A. Badzian, and G. Morell: Electron field emission properties of gamma irradiated microcrystalline diamond and nanocrystalline carbon thin films. J. Appl. Phys. 92, 3311 (2002).
    • (2002) J. Appl. Phys , vol.92 , pp. 3311
    • Gupta, S.1    Weiss, B.L.2    Weiner, B.R.3    Pilione, L.4    Badzian, A.5    Morell, G.6
  • 26
    • 0035270089 scopus 로고    scopus 로고
    • Electrical properties and defect analysis of neutron irradiated undoped CVD diamond films
    • M. Bruzzi, S. Miglio, S. Pirollo, and S. Sciortino: Electrical properties and defect analysis of neutron irradiated undoped CVD diamond films. Diamond Relat. Mater. 10, 601 (2001).
    • (2001) Diamond Relat. Mater , vol.10 , pp. 601
    • Bruzzi, M.1    Miglio, S.2    Pirollo, S.3    Sciortino, S.4
  • 27
    • 33846277585 scopus 로고    scopus 로고
    • Residual stress, intermolecular force, and frictional properties distribution maps of diamond films for micro- and nano-electromechanical (M/NEMS) applications
    • S. Gupta, O.A. Williams, R.J. Patel, and K. Haenen: Residual stress, intermolecular force, and frictional properties distribution maps of diamond films for micro- and nano-electromechanical (M/NEMS) applications. J. Mater. Res. 21, 3037 (2006).
    • (2006) J. Mater. Res , vol.21 , pp. 3037
    • Gupta, S.1    Williams, O.A.2    Patel, R.J.3    Haenen, K.4
  • 29
    • 38349104566 scopus 로고    scopus 로고
    • Cycloaddition-like reactions at germanium (100) surfaces: Adsorption and reaction of 1,5-cyclooctadiene
    • P. Prayongpan, D.S. Stripe, and CM. Greenlief: Cycloaddition-like reactions at germanium (100) surfaces: Adsorption and reaction of 1,5-cyclooctadiene. Surf. Sci. 602, 571 (2008).
    • (2008) Surf. Sci , vol.602 , pp. 571
    • Prayongpan, P.1    Stripe, D.S.2    Greenlief, C.M.3
  • 30
    • 36449006560 scopus 로고
    • Fano interference of the Raman phonon in heavily boron-doped diamond films grown by chemical vapor deposition
    • J.W. Agerlll, W. Walukiewicz, M. McMluskey, M.A. Piano, and M.I. Landstrass: Fano interference of the Raman phonon in heavily boron-doped diamond films grown by chemical vapor deposition. Appl. Phys. Lett. 66, 616 (1995).
    • (1995) Appl. Phys. Lett , vol.66 , pp. 616
    • Agerlll, J.W.1    Walukiewicz, W.2    McMluskey, M.3    Piano, M.A.4    Landstrass, M.I.5
  • 31
    • 2442581283 scopus 로고    scopus 로고
    • About the origin of the low wave number structures of the Raman spectra of heavily boron doped diamond films
    • M. Bernard, C. Baron, and A. Deneuville: About the origin of the low wave number structures of the Raman spectra of heavily boron doped diamond films. Diamond Relat. Mater. 13,896 (2004).
    • (2004) Diamond Relat. Mater , vol.13 , pp. 896
    • Bernard, M.1    Baron, C.2    Deneuville, A.3
  • 32
    • 8644292434 scopus 로고    scopus 로고
    • Raman spectroscopy of diamond and doped diamond
    • S. Prawer and R.J. Nemanich: Raman spectroscopy of diamond and doped diamond. Proc. R. Soc. London, Ser. A 362,2537 (2004).
    • (2004) Proc. R. Soc. London, Ser. A , vol.362 , pp. 2537
    • Prawer, S.1    Nemanich, R.J.2
  • 34
    • 2842515744 scopus 로고
    • Effects of configuration interaction on intensities and phase shifts
    • U. Fano: Effects of configuration interaction on intensities and phase shifts. Phys. Rev. 124, 1866 (1961).
    • (1961) Phys. Rev , vol.124 , pp. 1866
    • Fano, U.1
  • 35
    • 0036508107 scopus 로고    scopus 로고
    • Recombination-enhanced diffusion of self-interstitial atoms and vacancy-Interstitial recombination in diamond
    • M.E. Newton, B.A. Campbell, and D.J. Twitchen: Recombination-enhanced diffusion of self-interstitial atoms and vacancy-Interstitial recombination in diamond. Diamond Relat. Mater. 11, 618 (2002).
    • (2002) Diamond Relat. Mater , vol.11 , pp. 618
    • Newton, M.E.1    Campbell, B.A.2    Twitchen, D.J.3
  • 36
    • 36149043793 scopus 로고
    • Optical absorption and luminescence in diamond
    • J. Walker: Optical absorption and luminescence in diamond. Rep. Prog. Phys. 42, 1605 (1979).
    • (1979) Rep. Prog. Phys , vol.42 , pp. 1605
    • Walker, J.1
  • 37
    • 65349189221 scopus 로고    scopus 로고
    • L.R. Cao, R.G. Downing, and S. Gupta: The analysis of gamma irradiated boron-doped diamond films by cold neutron depth profiling using computerized data reduction. ACNS Workshop, Santa Fe, New Mexico, May 11-15, Extended abstract (2008).
    • L.R. Cao, R.G. Downing, and S. Gupta: The analysis of gamma irradiated boron-doped diamond films by cold neutron depth profiling using computerized data reduction. ACNS Workshop, Santa Fe, New Mexico, May 11-15, Extended abstract (2008).
  • 40
    • 0010329127 scopus 로고
    • Infra-red absorption in boron-doped diamond thin films
    • J. Mort, M.A. Machonkin, and K. Okumura: Infra-red absorption in boron-doped diamond thin films. Appl. Phys. Lett. 58,1908 (1991).
    • (1991) Appl. Phys. Lett , vol.58 , pp. 1908
    • Mort, J.1    Machonkin, M.A.2    Okumura, K.3
  • 41
    • 0002879530 scopus 로고
    • Diffraction. II. Intensities of diffracted beams
    • 2nd ed, Addison-Wesley, Reading, MA
    • B.D. Cullity: Diffraction. II. Intensities of diffracted beams, in Elements of X-ray Diffraction, 2nd ed. (Addison-Wesley, Reading, MA, 1978), pp. 102-111.
    • (1978) Elements of X-ray Diffraction , pp. 102-111
    • Cullity, B.D.1
  • 42
    • 65349094872 scopus 로고    scopus 로고
    • JCPDS No. 26-233. International Center for Diffraction Data: Newton Square, PA, 1984.
    • JCPDS No. 26-233. International Center for Diffraction Data: Newton Square, PA, 1984.
  • 44
    • 0028374363 scopus 로고
    • The migration of interstitial H in diamond and its pairing with substitutional B and N: Molecular orbital theory
    • S.P. Mehandru and A.B. Anderson: The migration of interstitial H in diamond and its pairing with substitutional B and N: Molecular orbital theory. J. Mater. Res. 9, 383 (1994).
    • (1994) J. Mater. Res , vol.9 , pp. 383
    • Mehandru, S.P.1    Anderson, A.B.2
  • 46
    • 4243497867 scopus 로고
    • Characterization of low pressure deposited diamond films by x-ray photoelectron spectroscopy
    • R. Chourasia, D.R. Chopra, S.C Sharma, M. Green, C.A. Dark, and R.C. Hyer: Characterization of low pressure deposited diamond films by x-ray photoelectron spectroscopy. Thin Solid Films 193-194, 1079 (1990).
    • (1990) Thin Solid Films , vol.193-194 , pp. 1079
    • Chourasia, R.1    Chopra, D.R.2    Sharma, S.C.3    Green, M.4    Dark, C.A.5    Hyer, R.C.6


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.