Integration of bulk acoustic wave filters: Concepts and trends

IEEE MTT-S International Microwave Symposium Digest

Volumn 1, Issue , 2004, Pages 395-398

  Elbrecht, L ^a   Aigner, R ^a   Lin, C I ^a   Timme, H J ^a  

^a INFINEON TECHNOLOGIES AG   (Germany)

Author keywords

BiCMOS integrated circuits; Bulk acoustic wave devices; Multichip modules

Indexed keywords

BICMOS INTEGRATED CIRCUITS; BULK ACOUSTIC WAVE (BAW) FILTERS; LOW NOISE AMPLIFIERS (LNA); MONOLITHIC INTEGRATION;

BIPOLAR INTEGRATED CIRCUITS; CERAMIC MATERIALS; CODE DIVISION MULTIPLE ACCESS; MOBILE TELECOMMUNICATION SYSTEMS; MULTICHIP MODULES; PASSIVATION; POWER AMPLIFIERS; ROBUSTNESS (CONTROL SYSTEMS);

ACOUSTIC BULK WAVE DEVICES;

EID: 4444223350     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. R. Ruby, P. Bradley, J. Larson, Y. Oshmyansyk, and D. Figueredo, "Ultra-miniature high-Q filters and duplexers using FBAR technology", Proceedings of IEEE ISSCC coherence, San Francisco, February 2001.
2. R. Aigner, J. Ella, H.J. Timme, L. Eibrecht, W. Nessler, and S. Marksteiner, "Advancement of MEMS into RF-filter applications", Proceedings of IEEE International Electron Devices Meeting, San Francisco, December 2002.
3. R. Aigner, J. Kaitila, J. Ellä, L. Eibrecht, W. Nessler, M. Handtmann, T. Herzog, and S. Marksteiner, "Bulk-acoustic-wave filters: Performance optimization and volume manufacturing", Proceedings of. IEEE International Microwave Symposium, Philadelphia, June 2003.
4. R. Brederlow et al., "Biochemical sensors based on bulk acoustic wave resonators", Proceedings of IEEE International Electron Devices Meeting, Washington, December, 2003, to be published.