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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 22, Issue 3, 2004, Pages 465-471

Effects of thermal annealing of W/SiO2 multilayer Bragg reflectors on resonance characteristics of film bulk acoustic resonator devices with cobalt electrodes

(4) Yim, Munhyuk a Kim, Dong Hyun a Chai, Dongkyu a Yoon, Giwan a

a Korea Advanced Institute of Science and Technology (KAIST) (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE FILTERS; COBALT; DEPOSITION; ELECTRODES; ELECTRONIC EQUIPMENT; INTEGRATED CIRCUITS; MAGNETRON SPUTTERING; MELTING; MIRRORS; MULTILAYERS; OXIDATION; Q FACTOR MEASUREMENT; RAPID THERMAL ANNEALING; RESONANCE; TUNGSTEN ALLOYS;

FILM BULK ACOUSTIC WAVE RESONATORS (FBAR); MELTING POINTS; QUALITY FACTOR; RADIO FREQUENCY (RF);

ACOUSTIC RESONATORS;

EID: 3142550780 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1690248 Document Type: Article

Times cited : (16)

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