Temperature characteristics of ZnO-based thin film bulk acoustic wave resonators

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 2001, Pages 823-826

  Pinkett, S L ^a   Hunt, W D ^a   Barber, B P ^b   Gammel, P L ^b  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b AGERE SYSTEMS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MATHEMATICAL MODELS; RESONATORS; THERMAL EFFECTS; THIN FILMS; ZINC OXIDE;

BALLATO ELECTRONIC CIRCUIT MODEL; THIN FILM BULK ACOUSTIC WAVE RESONATORS;

ACOUSTIC BULK WAVE DEVICES;

EID: 0035732307     PISSN: 10510117     EISSN: None     Source Type: Journal    
DOI: 10.1109/ULTSYM.2001.991847     Document Type: Article

References (8)

1. Development of miniature filters for wireless applications
2. Temperature compensated bulk acoustic thin film resonators
3. Bulk and surface acoustic wave excitation and network representation
4. Zero-temperature-coefficient SAW devices on AlN epitaxial films
5. 2/Si thin film resonator for VHF voltage controlled oscillator
6. Sensitivity analysis of a thin film bulk acoustic resonator ladder filter