Influence of driving frequency on oxygen atom density in O2 radio frequency capacitively coupled plasma

Journal of Physics D: Applied Physics

Volumn 37, Issue 19, 2004, Pages 2670-2676

  Kitajima, Takeshi ^a   Noro, Kouichi ^a   Nakano, Toshiki ^a   Makabe, Toshiaki ^b  

^a NATIONAL DEFENSE ACADEMY   (Japan)

^b KEIO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION; ELECTRODES; FLUORESCENCE; LIQUID CRYSTAL DISPLAYS; OXIDATION; PHOTORESISTS; PLASMA DENSITY; PLASMAS; SURFACES; VACUUM APPLICATIONS;

CAPACITIVELY COUPLED PLASMA (CCP); DIFFUSION MODEL; RECOMBINATION COEFFICIENT; TWO-PHOTON LASER INDUCED FLUORESCENCE (LIF);

OXYGEN;

EID: 6344285351     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/37/19/010     Document Type: Article

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