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Proceedings - Electrochemical Society

Volumn 11, Issue , 2003, Pages 152-163

UHV-EC studies of wet cleaning procedures for GaAs substrates for electrodeposition

(3) Ward, L C a Muthuvel, M a Stickney, J L a

a UNIVERSITY OF GEORGIA (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANTECHAMBERS; AUGER SPECTROSCOPY; DILUTE ACID ETCHES; OPEN CIRCUITS;

CARBON; CLEANING; CYCLIC VOLTAMMETRY; ELECTROCHEMISTRY; ELECTRODEPOSITION; ETCHING; HETEROJUNCTIONS; LOW ENERGY ELECTRON DIFFRACTION; ORGANIC SOLVENTS; OXYGEN; SURFACE PHENOMENA;

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 6344261569 PISSN: None EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (3)

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