Effect of the miscut direction in (111) 3C-SiC film growth on off-axis (111)Si

Applied Physics Letters

Volumn 94, Issue 10, 2009, Pages

  Severino, A ^a   Camarda, M ^a   Condorelli, G ^b   Perdicaro, L M S ^b   Anzalone, R ^a   Mauceri, M ^b   La Magna, A ^a   La Via, F ^a  

^a CNR   (Italy)

^b Epitaxial Technology Center   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EPITAXIAL GROWTH; MONTE CARLO METHODS; MOSFET DEVICES; SILICON; SILICON CARBIDE;

3C-SIC FILMS; [110] DIRECTIONS; HETERO-EPITAXIAL GROWTHS; KINETIC MONTE CARLO METHODS; MISCUT DIRECTIONS; NUMERICAL SIMULATIONS; OFF-AXIS; SI SUBSTRATES; STACKING FAULT DENSITIES;

FILM GROWTH;

EID: 62549131687     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3085769     Document Type: Article

References (14)

1. M. Kawabe and T. Ueda, Jpn. J. Appl. Phys., Part 2 25, L285 (1986).
2. T. Kusumori, H. Muto, M. Okada, and P. Jin, Thin Solid Films 513, 307 (2006).
3. K. Shibahara, S. Nishino, and H. Matsunami, J. Cryst. Growth 78, 538 (1986).
4. J. A. Powell, L. G. Matus, M. A. Kuczmarski, C. M. Chorey, T. T. Cheng, and P. Pirouz, Appl. Phys. Lett. 51, 823 (1987).
5. A. A. Volinsky, G. Kravchenko, P. Waters, J. D. Reddy, C. Locke, C. Frewin, and S. E. Saddow, Mater. Res. Soc. Symp. Proc. 1069, D03-05 (2008).
6. See http://www.ioffe.rssi.ru/SVA/NSM/Semicond/Si/mechanic.html for more information about Si mechanical properties.
7. K. Takahashi, S. Nishino, and J. Saraie, J. Electrochem. Soc. 139, 3565 (1992).
8. M. Zielinski, M. Portail, T. Chassagne, S. Kret, M. Nemoz, and Y. Cordier, Mater. Res. Soc. Symp. Proc. 1069, D07-09 (2008).
9. C. A. Ball and J. H. Van der Merwe, in Dislocations in Solids, edited by, R. N. Nabarro, (North-Holland, Amsterdam, 1983), p. 123.
10. E. Polychroniadis, M. Syvajarvi, R. Yakimova, and J. Stoemenos, J. Cryst. Growth 263, 68 (2004).
11. J. Yun, T. Takahashi, S. Kuroda, Y. Ishida, and H. Okumura, J. Cryst. Growth 308, 50 (2007).
12. A. Boulle, D. Chaussende, L. Latu-Romain, F. Conchon, O. Masson, and R. Guinebretìre, Appl. Phys. Lett. 89, 091902 (2006).
13. L. Latu-Romain, D. Chaussende, C. Balloud, S. Juillaguet, L. Rapenne, E. Pernot, J. Camassel, M. Pons, and R. Madar, Mater. Sci. Forum 527, 99 (2006).
14. M. Camarda, A. La Magna, A. Severino, and F. La Via, Mater. Sci. Forum 615-617, 117 (2009).