Experimental proximity matching of ArF scanners

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7140, Issue , 2008, Pages

  Bekaert, Joost ^a   Van Look, L ^a   De Bisschop, P ^a   Van De Kerkhove, J ^a   Vandenberghe, G ^a   Schreel, K ^b   Menger, J ^b   Schiffelers, G ^b   Knols, E ^b   Van Der Laan, H ^b   Willekers, R ^b  

^a IMEC   (Belgium)

^b ASML   (Netherlands)

Author keywords

OPC; Optical proximity correction; Optical proximity matching; Scanner matching; Scanner tuning; XT:1900i, XT:1700i

Indexed keywords

OPC; OPTICAL PROXIMITY CORRECTION; OPTICAL PROXIMITY MATCHING; SCANNER MATCHING; SCANNER TUNING; XT:1900I, XT:1700I;

EXPOSURE METERS; OPTICAL RESOLVING POWER; SENSITIVITY ANALYSIS; TUNING;

SCANNING;

EID: 62449186580     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.804670     Document Type: Conference Paper

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