Active spectral control of DUV light sources for OPE minimization

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6154 II, Issue , 2006, Pages

  Dunstan, Wayne J ^a   Jacques, Robert ^a   Rafac, Robert J ^a   Rao, Rajasekhar ^a   Trintchouk, Fedor ^a  

^a CYMER INC   (United States)

Author keywords

Active; Bandwidth; Control; E95; FWHM; Laser

Indexed keywords

ALGORITHMS; ARRAYS; BANDWIDTH; LIGHT SOURCES; OPTIMIZATION;

E95; FWHM; OPTICAL PROXIMITY EFFECT (OPE); PASSIVE BANDWIDTH STABILIZATION;

IMAGING SYSTEMS;

EID: 33745775436     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.659283     Document Type: Conference Paper

References (0)