A compact model for dielectric charging in RF MEMS capacitive switches

International Journal of RF and Microwave Computer-Aided Engineering

Volumn 19, Issue 2, 2009, Pages 197-203

  Sumant, Prasad S ^a   Aluru, Narayana R ^a   Cangellaris, Andreas C ^b  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b University of Illinois at Urbana Champaign   (United States)

Author keywords

Capacitive switches; Dielectric charging; RF MEMS; SPICE; System level modeling

Indexed keywords

CAPACITIVE SWITCHES; CIRCUIT SIMULATORS; COMPACT MODELS; COMPLEX CONTROLS; DIELECTRIC CHARGING; EFFICIENT SIMULATIONS; MICRO-ELECTRO MECHANICAL SYSTEMS; MODEL PARAMETERS; NON-LINEAR BEHAVIORS; ONE-DIMENSIONAL MODELS; PERFORMANCE DEGRADATIONS; PHYSICS-BASED; RADIO FREQUENCIES; RF MEMS; RF MEMS CAPACITIVE SWITCHES; SIMULATION PROGRAM WITH INTEGRATED CIRCUIT EMPHASIS; SYSTEM LEVEL MODELING; SYSTEM LEVELS;

CIRCUIT SIMULATION; COMPUTER AIDED ANALYSIS; ELECTRIC CHARGE; ELECTRIC SWITCHES; INTEGRATED CIRCUITS; MEMS; MICROELECTROMECHANICAL DEVICES;

SPICE;

EID: 62149114797     PISSN: 10964290     EISSN: 1099047X     Source Type: Journal    
DOI: 10.1002/mmce.20340     Document Type: Article

References (13)

1. C. Goldsmith, J. Ehmke, A. Malczewski, B. Pillans, S. Eshelman, Z. Yao, J. Brank, and M. Eberly, Lifetime characterization of capacitive RF MEMS switches, IEEE MTT-S Int Microwave Symp Dig 1 (2001), 227-230.
2. S.M. Sze, Physics of semiconductor devices, Wiley, New York, 1969.
3. X. Yuan, S.V. Cherepko, J.C.M. Hwang, C.L. Goldsmith, C. Nordquist, and C. Dyck, Initial observation and analysis of dielectric charging effects on RF MEMS capacitive switches, IEEE MTT-S Int Microwave Symp Dig 3 (2004), 1943-1946.
4. X. Yuan, J.C.M. Hwang, D. Forehand, and C.L. Goldsmith, Modeling and characterization of dielectric charging effects in RF MEMS capacitive switches, IEEE MTT-S Int Microwave Symp Dig (2005), 753-756.
5. S. Melle, D.D. Conto, D. Dubuc, K. Grenier, O. Vendier, J.-L. Muraro, J.-L. Cazaux, and R. Plana, Reliability modeling of capacitive RF MEMS, IEEE Trans Microwave Theory Tech 53 (2005), 3482-3488.
6. W.M.v. Spengen, R. Peurs, R. Mertens, and I.D. Wolf, A comprehensive model to predict the charging and reliability of capacitive RF MRMS switches, J Micromech Microeng 14 (2004), 514-521.
7. G.J. Papaionnou, M. Exarchos, V. Theonas, G. Wang, and J. Papapolymerou, On the dielectric polarization effects in capacitive RF MEMS switches, IEEE MTTS Int Microwave Symp Dig (2005), 761-764.
8. X. Yuan, Z. Peng, J.C.M. Hwang, D. Forehand, and C.L. Goldsmith, A transient SPICE model for dielectric- charging effects in RF MEMS capacitive switches, IEEE Trans Electron Dev 53 (2006), 2640-2648.
9. Z. Peng, X. Yuan, J.C.M. Hwang, D. Forehand, and C.L. Goldsmith, Dielectric charging of RF MEMS capacitive switches under bipolar control voltage waveforms, IEEE MTT-S Int Microwave Symp Dig (2007), 1817-1820.
10. P.S. Sumant, A.C. Cangellaris, and N.R. Aluru, Modeling of dielectric charging in RF MEMS capacitive switches, Microwave Opt Technol Lett 49 (2007), 3188-3192.
11. Z. Peng, X. Yuan, J.C.M. Hwang, D. Forehand, and C.L. Goldsmith, Top vs. bottom charging of the dielectric in RF MEMS capacitive switches, Proceedings of the Asia Pacific Microwave Conference, 2006. Japan, 12-15 Dec 2006.
12. J.D. Jackson, Classical electrodynamics, Wiley, New York, 1999.
13. K. Madsen, H.B. Nielson, and O. Tingleff, Methods for non linear least squares problems (2004), IMM Lecture note [Online], Available at: http://www2.imm.dtu.dk/pubdb/views/edoc/-download.php/3215/pdf/imm3215.pdf. [accessed 5th May, 2008].