Modeling of dielectric charging in RF MEMS capacitive switches

Microwave and Optical Technology Letters

Volumn 49, Issue 12, 2007, Pages 3188-3192

  Sumant, Prasad S ^a   Cangellaris, Andreas C ^b   Alum, Narayana R ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b University of Illinois at Urbana Champaign   (United States)

Author keywords

Capacitive switches; Dielectric charging; RF MEMS; Surface roughness

Indexed keywords

CAPACITIVE SWITCHES; DIELECTRIC CHARGING; MACROSCOPICS; QUANTITATIVE DESCRIPTIONS;

COMPUTER AIDED ANALYSIS; ELECTRIC FIELDS; MATHEMATICAL MODELS; MEMS; PARAMETER ESTIMATION; SURFACE ROUGHNESS;

SWITCHES;

EID: 36148968036     PISSN: 08952477     EISSN: None     Source Type: Journal    
DOI: 10.1002/mop.22903     Document Type: Article

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